Femtosecond laser fabrication and characterization of microchannels and waveguides in methacrylate-based polymers

Microsystem Technologies

Volumn 18, Issue 2, 2012, Pages 183-190

  De Marco, Carmela ^a   Suriano, Raffaella ^a   Levi, Marinella ^a   Turri, Stefano ^a   Eaton, Shane ^a   Cerullo, Giulio ^a   Osellame, Roberto ^a  

^a POLITECNICO DI MILANO   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

ATTENUATED TOTAL REFLECTANCE; DIMETHACRYLATES; ENERGY DEPOSITIONS; ENVIRONMENTAL SCANNING ELECTRON MICROSCOPY; FEMTO-SECOND LASER; FEMTOSECOND LASER ABLATION; FS-LASER; HIGH PRECISION PROCESSING; LASER PROFILOMETERS; MATERIAL-BASED; METHACRYLIC MONOMERS; MICRO-FLUIDIC DEVICES; PHYSICOCHEMICAL PROPERTY; POLY(ETHYLENE GLYCOL) METHACRYLATE; POLYMERIC MICROFLUIDIC DEVICES; SHARP EDGES; SURROUNDING MATERIALS; TETRAETHYLENE GLYCOLS; THERMAL DAMAGE; UV CURING PROCESS;

CHEMICAL PROPERTIES; CONTACT ANGLE; FABRICATION; FLUIDIC DEVICES; FOURIER TRANSFORM INFRARED SPECTROSCOPY; MICROCHANNELS; POLYETHYLENE GLYCOLS; REFRACTIVE INDEX; SCANNING ELECTRON MICROSCOPY; ULTRASHORT PULSES; WAVEGUIDES;

POLYMERS;

EID: 84857371387     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-011-1347-2     Document Type: Conference Paper

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