Step-index optical waveguide produced by multistep ion implantation in LiNbO3

Optics Express

Volumn 20, Issue 4, 2012, Pages 4444-4453

  Montanari, G B ^a   De Nicola, P ^a   Sugliani, S ^a   Menin, A ^a   Parini, A ^a   Nubile, A ^a   Bellanca, G ^a,b   Chiarini, M ^a,c   Bianconi, M ^a,d   Bentini, G G ^a,d  

^a Laboratorio di Micro e Submicro Tecnologie Abilitanti Dell'Emilia Romagna (MISTE R)   (Italy)

^b UNIVERSITY OF FERRARA   (Italy)

^c CGS SPA   (Italy)

^d CNR   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

OPTICAL WAVEGUIDES; REFRACTIVE INDEX; WAVEGUIDES;

ANNEALING TEMPERATURES; DAMAGE DEPTHS; DAMAGED LAYERS; DEVICE FABRICATIONS; ION IMPLANTED; LITHIUM NIOBATE; MULTI-STEP; PROFILE SHAPES; STEP-INDEX PROFILE;

ION IMPLANTATION;

EID: 84857352142     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.20.004444     Document Type: Article

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