High quality factor two dimensional GaN photonic crystal cavity membranes grown on silicon substrate

Applied Physics Letters

Volumn 100, Issue 7, 2012, Pages

  Vico Trivino N ^a   Rossbach, G ^a   Dharanipathy, U ^a   Levrat, J ^a   Castiglia, A ^a   Carlin, J F ^a   Atlasov, K A ^a   Butte R ^a   Houdre R ^a   Grandjean, N ^a  

^a EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

BIOFLUORESCENCE; CAVITY QUANTUM ELECTRODYNAMICS; DRY ETCHING TECHNIQUES; E-BEAM LITHOGRAPHY; FREESTANDING GAN; HARD MASKS; HIGH QUALITY FACTORS; INGAN/GAN QUANTUM WELL; LOW TEMPERATURES; METAL-ORGANIC VAPOR PHASE EPITAXY; MICROPHOTOLUMINESCENCE; NANO-CAVITIES; PHOTONIC CRYSTAL CAVITIES; QUALITY FACTORS; SI (1 1 1); SI(111) SUBSTRATE; SILICON SUBSTRATES; UNDERETCHING; UV- AND; VISIBLE RANGE;

GALLIUM NITRIDE; NANOPHOTONICS; SEMICONDUCTOR QUANTUM WELLS; SILICON; SILICON COMPOUNDS; SILICON ON INSULATOR TECHNOLOGY;

PHOTONIC CRYSTALS;

EID: 84857324537     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3684630     Document Type: Article

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