SCOPUS 정보 검색 플랫폼

Applied Physics Letters

Volumn 100, Issue 6, 2012, Pages

Plasma resonances in a microwave-driven microdischarge

(3) Xue, J a Urdahl, R S a Cooley, J E a

a AGILENT LABORATORIES (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITIVELY COUPLED; CIRCUIT MODELS; DRIVING FREQUENCIES; ELECTRON DENSITIES; INPUT POWER; LOW PRESSURES; MICRODISCHARGES; MICROWAVE-DRIVEN; MODEL RESULTS; OUTPUT IMPEDANCE; PLASMA RESONANCE; RADIOFREQUENCY SIGNALS; REFLECTED POWER; SERIES RESONANCE;

CARRIER CONCENTRATION; ELECTRON DENSITY MEASUREMENT;

RESONANCE;

EID: 84857202675 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.3681146 Document Type: Article

Times cited : (13)

References (9)

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