Hybrid integration of microfabricated chemocapacitor arrays with miniaturized read-out electronics towards low-power gas sensing module

Procedia Engineering

Volumn 25, Issue , 2011, Pages 1117-1120

  Oikonomou, P ^a   Botsialas, A ^a   Patsis, G ^a,b   Manoli, K ^a,c   Goustouridis, D ^a   Valamontes, E ^b   Pantazis, N ^b   Sanopoulou, M ^c   Raptis, I ^a  

^a INSTITUTE OF MICROELECTRONICS   (Greece)

^b UNIVERSITY OF WEST ATTICA   (Greece)

^c Institute of Physical Chemistry   (Greece)

Author keywords

Chemcapacitor; Gas sensing; Polymer; Volatile organic compounds

Indexed keywords

ANALOG MULTIPLEXER; ARRAY ELEMENTS; CAPACITIVE SENSOR; CHEMCAPACITOR; GAS SENSING; HUMIDITY LEVELS; HYBRID INTEGRATION; HYBRID MODULES; INTERDIGITATED ELECTRODES; LOW POWER; MICROFABRICATED; P-XYLENE; READOUT ELECTRONICS;

GAS DETECTORS; MICROELECTRONICS; POLYMERS; SENSOR ARRAYS; TOLUENE; VOLATILE ORGANIC COMPOUNDS; XYLENE;

CHEMICAL DETECTION;

EID: 84857187196     PISSN: 18777058     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1016/j.proeng.2011.12.275     Document Type: Conference Paper

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