Micromachined NH 3 gas sensor with ppb-level sensitivity based on WO 3 nanoparticles thinfilm

Procedia Engineering

Volumn 25, Issue , 2011, Pages 1149-1152

  Dao, Dzung Viet ^a   Shibuya, Kyoji ^b   Bui, Tung Thanh ^a   Sugiyama, Susumu ^a  

^a RITSUMEIKAN UNIVERSITY   (Japan)

^b HORIBA LTD   (Japan)

Author keywords

Gas sensor; Micromachine; NH 3; WO 3

Indexed keywords

A-FRAMES; CHIP SIZES; INTER-DIGITATED ELECTRODES; LIMIT OF DETECTION; MEASUREMENT RESULTS; MICROMACHINED; MICROMACHINED GAS SENSOR; MICROMACHINES; NANO-GAP; NH 3; PARTS PER BILLION; POWER-LOSSES; SENSOR STRUCTURES; SYSTEM NOISE; THERMAL CONDUCTION; THERMAL EFFICIENCY; TINY BEAMS; TUNGSTEN TRIOXIDE; WET AIR; WO 3; WORKING TEMPERATURES;

DIAPHRAGMS; GAS DETECTORS; TUNGSTEN;

CHEMICAL SENSORS;

EID: 84857166319     PISSN: 18777058     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1016/j.proeng.2011.12.283     Document Type: Conference Paper

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