Microneedle-based electrodes with integrated through-silicon via for biopotential recording

Procedia Engineering

Volumn 25, Issue , 2011, Pages 992-995

  O'Mahony, Conor ^a   Pini, Francesco ^a,b   McCarthy, Kevin G ^b  

^a UNIVERSITY COLLEGE CORK   (Ireland)

^b UNIVERSITY COLLEGE CORK   (Ireland)

Author keywords

Biopotential; Dry electrode; Electrocardiography (ECG); Electromyography; Microneedle; Potassium hydroxide

Indexed keywords

BIOPOTENTIALS; DRY ELECTRODE; ELECTRICAL CONTACTS; MICRONEEDLE ARRAYS; MICRONEEDLES; PHYSIOLOGICAL SIGNALS; WAFER PATTERNING;

ELECTROCARDIOGRAPHY; ELECTROMYOGRAPHY; POTASSIUM HYDROXIDE; SILICON WAFERS; WET ETCHING;

NEEDLES;

EID: 84857157359     PISSN: 18777058     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1016/j.proeng.2011.12.244     Document Type: Conference Paper

References (3)

1. Thakor NV. Bipotentials and electrophysiology measurement. In: Webster JG, editor: The measurement, instrumentation and sensors handbook, Boca Raton: CRC Press; 1998, Chapter 74
2. Griss P, Tolvanen-Laakso HK, Meriläinen P, Stemme G. Micromachined electrodes for biopotential measurements. IEEE Trans Biomed Eng 2002; 49(6):597-604
3. Wilke N, Reed M L and Morrissey A. The evolution from convex corner undercut towards microneedle formation: Theory and experimental verification. J Micromech Microeng 2006; 16:808-814