Roll to roll fabrication of thin film silicon solar cells on nano-textured substrates

Journal of Nanoscience and Nanotechnology

Volumn 11, Issue 12, 2011, Pages 10604-10609

  Soppe, W J ^a   Borg, H ^b   Van Aken, B B ^a   Devilee, C ^a   Dorenkamper M ^a   Goris, M ^a   Heijna, M C R ^a   Loffler J ^a   Peeters, P ^b  

^a TNO   (Netherlands)

^b OM and T BV   (Netherlands)

Author keywords

Light trapping; Nanoimprinting; Thin film silicon solar cells

Indexed keywords

BARRIER LAYERS; DEVICE-QUALITY; FABRICATION PROCESS; HOT-EMBOSSING; INITIAL EFFICIENCY; INSULATING BARRIER LAYERS; KEY FEATURE; LASER SCRIBING; LIGHT-TRAPPING; LINEAR PLASMA SOURCES; NANO-IMPRINTING; PROCESS STEPS; ROLL-TO-ROLL FABRICATION; ROLL-TO-ROLL PROCESSING; SILICON LAYER; STEEL FOILS; STEEL SUBSTRATE; SUBMICRON; SUBMICRON STRUCTURES; SURFACE PROFILES; TEXTURIZATION; THIN FILM SILICON SOLAR CELLS;

DEPOSITION; SILICON; SILICON SOLAR CELLS; THIN FILMS;

VAPOR DEPOSITION;

EID: 84857154301     PISSN: 15334880     EISSN: None     Source Type: Journal    
DOI: 10.1166/jnn.2011.4075     Document Type: Conference Paper

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