Fabrication of conducting AFM cantilevers with AlN-based piezoelectric actuators

Procedia Engineering

Volumn 25, Issue , 2011, Pages 665-668

  Quenzer, H J ^a   Drechsler, U ^b   Sebastian, A ^b   Marauska, S ^a   Wagner, B ^a   Despont, M ^b  

^a FRAUNHOFER INSTITUTE FOR SILICON TECHNOLOGY ISIT   (Germany)

^b IBM RESEARCH ZURICH   (Switzerland)

Author keywords

Actuator; AFM probe; AlN; Piezoelectric thin films

Indexed keywords

AFM; AFM PROBE; ALN; ALN LAYERS; CONDUCTING AFM; FABRICATION TECHNOLOGIES; HIGH QUALITY; HIGH WEAR RESISTANCE; IMAGING EXPERIMENTS; INTEGRATED POSITION SENSORS; PIEZOELECTRIC STRUCTURES; PIEZOELECTRIC THIN FILMS; PROCESS INTEGRATION; TAPPING MODES;

ACTUATORS; NANOCANTILEVERS; PIEZOELECTRIC ACTUATORS; PIEZOELECTRICITY;

ATOMIC FORCE MICROSCOPY;

EID: 84857146152     PISSN: 18777058     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1016/j.proeng.2011.12.164     Document Type: Conference Paper

References (3)

1. Joseph C Doll and Beth L Pruitt "Design of piezoresistive versus piezoelectric contact mode scanning probes" J. Micromech. Microeng. 20 (2010) 095023 (15pp) doi:10.1088/0960-1317/20/9/095023
2. S. Marauska, T. Dankwort, H.J. Quenzer, B. Wagner "Sputtered thin film piezoelectric aluminium nitride as a functional MEMS material and CMOS compatible process integration", Eurosensors 11, Athens, 2011
3. H. Bhaskaran, A. Sebastian, and M. Despont, "Nanoscale PtSi Tips for Conducting Probe Technologies", IEEE Transactions on Nanotechnology, vol. 8, no. 1 (2009), pp 128-13