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Volumn 36, Issue 2, 2012, Pages 299-314

Precision control of a T-type gantry using sensor/actuator averaging and active vibration damping

Author keywords

Control; Gantry; Linear motor; Vibration

Indexed keywords

ACTIVE VIBRATION DAMPING; CONTROL LAWS; CONTROL SCHEMES; CROSS-OVER FREQUENCIES; DIRECT DRIVE; FREQUENCY DOMAIN TECHNIQUES; GANTRY; LOOP-SHAPING; MOTION CONTROLLER; MULTI VARIABLES; PID CONTROLLERS; PRECISION CONTROL; SENSOR AND ACTUATORS; STABILITY AND ROBUSTNESS; STEP DISTURBANCES; VIBRATION;

EID: 84857108274     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.precisioneng.2011.11.003     Document Type: Article
Times cited : (23)

References (23)
  • 1
    • 43649090185 scopus 로고    scopus 로고
    • Development of ultra-precision machining system with unique wire edm tool fabrication system for micro/nano-machining
    • X. Cheng, K. Nakamoto, M. Sugai, S. Matsumoto, Z.G. Wang, and K. Yamazaki Development of ultra-precision machining system with unique wire edm tool fabrication system for micro/nano-machining Ann CIRP 57 1 2008 415 420
    • (2008) Ann CIRP , vol.57 , Issue.1 , pp. 415-420
    • Cheng, X.1    Nakamoto, K.2    Sugai, M.3    Matsumoto, S.4    Wang, Z.G.5    Yamazaki, K.6
  • 2
    • 0029222464 scopus 로고
    • Atomic-scale precision motion control stage (the angstrom stage)
    • M. Holmes, D. Trumper, and R. Hocken Atomic-scale precision motion control stage (the angstrom stage) Ann CIRP 44 1 1995 455 460
    • (1995) Ann CIRP , vol.44 , Issue.1 , pp. 455-460
    • Holmes, M.1    Trumper, D.2    Hocken, R.3
  • 3
    • 73249118065 scopus 로고    scopus 로고
    • A Newly Developed Linear Motor-Driven Aerostatic X-Y Planar Motion Table System for Nano-Machining
    • DOI 10.1016/j.cirp.2007.05.086, PII S000785060700090X
    • H. Shinno, H. Yoshioka, and K. Taniguchi A newly developed linear motor-driven aerostatic x-y planar motion table system for nano-machining Ann CIRP 56 1 2007 369 372 (Pubitemid 46898319)
    • (2007) CIRP Annals - Manufacturing Technology , vol.56 , Issue.1 , pp. 369-372
    • Shinno, H.1    Yoshioka, H.2    Taniguchi, K.3
  • 4
    • 67349149962 scopus 로고    scopus 로고
    • Five-axes accuracy enhancement by compact and integral design
    • C. Brecher, P. Utsch, and C. Wenzel Five-axes accuracy enhancement by compact and integral design Ann CIRP 58 1 2009 355 358
    • (2009) Ann CIRP , vol.58 , Issue.1 , pp. 355-358
    • Brecher, C.1    Utsch, P.2    Wenzel, C.3
  • 6
    • 0032306780 scopus 로고    scopus 로고
    • A comparison of linear and conventional electromechanical dives
    • G. Pritschow A comparison of linear and conventional electromechanical drives Ann CIRP 47 2 1998 541 548 (Pubitemid 128580331)
    • (1998) CIRP Annals - Manufacturing Technology , vol.47 , Issue.2 , pp. 541-548
    • Pritschow, G.1
  • 7
    • 34249310654 scopus 로고    scopus 로고
    • Precision coordinated control of multi-axis gantry stages
    • DOI 10.1016/j.isatra.2007.02.002, PII S0019057807000614
    • T.S. Giam, K.K. Tan, and S. Huang Precision coordinated control of multi-axis gantry stages ISA Trans 46 3 2007 399 409 (Pubitemid 46809738)
    • (2007) ISA Transactions , vol.46 , Issue.3 , pp. 399-409
    • Giam, T.S.1    Tan, K.K.2    Huang, S.3
  • 8
    • 0029705185 scopus 로고    scopus 로고
    • On the influence of the velocity gain factor on the path deviation
    • G. Pritschow On the influence of the velocity gain factor on the path deviation Ann CIRP 45 1 1996 367 371 (Pubitemid 126601468)
    • (1996) CIRP Annals - Manufacturing Technology , vol.45 , Issue.1 , pp. 367-371
    • Pritschow, G.1
  • 9
    • 0029344826 scopus 로고
    • Adaptive control strategies for a precision machine tools axis
    • M.H. Smith, A.M. Annaswamy, and A.H. Slocum Adaptive control strategies for a precision machine tools axis Prec Eng 17 3 1995 192 206
    • (1995) Prec Eng , vol.17 , Issue.3 , pp. 192-206
    • Smith, M.H.1    Annaswamy, A.M.2    Slocum, A.H.3
  • 10
    • 43949148914 scopus 로고
    • Directional damping control: Vibration reduction and optimality for precision slide motion
    • J.A. Abler, and P.I. Ro Directional damping control: vibration reduction and optimality for precision slide motion Prec Eng 16 2 1994 84 98
    • (1994) Prec Eng , vol.16 , Issue.2 , pp. 84-98
    • Abler, J.A.1    Ro, P.I.2
  • 11
    • 0029290642 scopus 로고
    • Submicrometer control of a traction drive using state feedback and estimation
    • G.S. Rao, and P.I. Ro Submicrometer control of a traction drive using state feedback and estimation Prec Eng 17 2 1995 124 130
    • (1995) Prec Eng , vol.17 , Issue.2 , pp. 124-130
    • Rao, G.S.1    Ro, P.I.2
  • 12
    • 3142710909 scopus 로고    scopus 로고
    • Gain-scheduling control of machine tools with varying structural flexibility
    • W. Symens, H. Van Brussel, and J. Swevers Gain-scheduling control of machine tools with varying structural flexibility Ann CIRP 53 1 2004 321 324
    • (2004) Ann CIRP , vol.53 , Issue.1 , pp. 321-324
    • Symens, W.1    Van Brussel, H.2    Swevers, J.3
  • 14
    • 68149123582 scopus 로고    scopus 로고
    • Compensation of Axial Vibrations in Ball Screw Drives
    • DOI 10.1016/j.cirp.2007.05.087, PII S0007850607000911
    • A. Kamalzadeh, and K. Erkorkmaz Compensation of axial vibrations in ball screw drives Ann CIRP 56 1 2007 373 378 (Pubitemid 46898320)
    • (2007) CIRP Annals - Manufacturing Technology , vol.56 , Issue.1 , pp. 373-378
    • Kamalzadeh, A.1    Erkorkmaz, K.2
  • 15
    • 67349191472 scopus 로고    scopus 로고
    • Dynamic stiffness enhancement of direct-driven machine tools using sliding mode control with disturbance recovery
    • Y. Altintas, and C.E. Okwudire Dynamic stiffness enhancement of direct-driven machine tools using sliding mode control with disturbance recovery Ann CIRP 58 1 2009 335 338
    • (2009) Ann CIRP , vol.58 , Issue.1 , pp. 335-338
    • Altintas, Y.1    Okwudire, C.E.2
  • 16
    • 34547099338 scopus 로고    scopus 로고
    • Dynamic modeling and adaptive control of a H-type gantry stage
    • DOI 10.1016/j.mechatronics.2007.04.004, PII S0957415807000426
    • C.S. Teo, K.K. Tan, S.Y. Lim, S. Huang, and E.B. Tay Dynamic modeling and adaptive control of a h-type gantry stage Mechatronics 17 7 2007 361 367 (Pubitemid 47102195)
    • (2007) Mechatronics , vol.17 , Issue.7 , pp. 361-367
    • Teo, C.S.1    Tan, K.K.2    Lim, S.Y.3    Huang, S.4    Tay, E.B.5
  • 17
    • 0031220840 scopus 로고    scopus 로고
    • An ultraprecision stage for alignment of wafers in advanced microlithography
    • C.W. Lee, and S.W. Kim An ultraprecision stage for alignment of wafers in advanced microlithography Prec Eng 21 2/3 1997 113 122
    • (1997) Prec Eng , vol.21 , Issue.2-3 , pp. 113-122
    • Lee, C.W.1    Kim, S.W.2
  • 18
    • 0036642105 scopus 로고    scopus 로고
    • Vibration control of flexible beams using sensor averaging and actuator averaging methods
    • DOI 10.1109/TCST.2002.1014676, PII S1063653602017669
    • M. Weng, X.D. Lu, and D.L. Trumper Vibration control of flexible beams using sensor averaging and actuator averaging methods IEEE Trans Control Syst Technol 10 4 2002 568 577 (Pubitemid 34798679)
    • (2002) IEEE Transactions on Control Systems Technology , vol.10 , Issue.4 , pp. 568-577
    • Weng, M.-C.1    Lu, X.2    Trumper, D.L.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.