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Volumn 285, Issue 8, 2012, Pages 2022-2027
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Differential confocal technology based on radial birefringent pupil filtering principle
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Author keywords
Differential confocal microscopy; Radial birefringent pupil filter; Super resolution
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Indexed keywords
AXIAL RESOLUTIONS;
BIREFRINGENT ELEMENTS;
CONFOCAL TECHNOLOGY;
CURVATURE RADII;
DETECTION MECHANISM;
HALF-WIDTH;
HIGH-LATERAL RESOLUTION;
IRREGULAR SURFACE;
JONES MATRIX;
LATERAL RESOLUTION;
LIMITED SPACE;
LOW COSTS;
NONCONTACT MEASUREMENTS;
PUPIL FILTERS;
PUPIL FUNCTION;
RESPONSE CURVES;
RESPONSE FUNCTIONS;
SIMPLE STRUCTURES;
SPATIAL RESOLUTION;
SUPER RESOLUTION;
ZERO COORDINATE;
CONFOCAL MICROSCOPY;
CURVE FITTING;
OPTICAL RESOLVING POWER;
OPTIMIZATION;
SURFACE ROUGHNESS;
BIREFRINGENCE;
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EID: 84857063231
PISSN: 00304018
EISSN: None
Source Type: Journal
DOI: 10.1016/j.optcom.2011.12.062 Document Type: Article |
Times cited : (15)
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References (11)
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