A piezoelectric single-crystal ultrasonic microactuator for driving optics

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 58, Issue 12, 2011, Pages 2737-2742

  Guo, Mingsen ^a,b   Dong, Shuxiang ^a   Ren, Bo ^c   Luo, Haosu ^c  

^a PEKING UNIVERSITY   (China)

^b NANJING UNIVERSITY OF AERONAUTICS AND ASTRONAUTICS   (China)

^c SHANGHAI INSTITUTE OF CERAMICS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

DRIVING FORCES; ELECTROMAGNETIC ACTUATORS; FRICTIONAL FORCES; HIGH FREQUENCY HF; MICROMETER SCALE; MICROSCOPIC DISPLACEMENT; PIEZOCERAMIC; ULTRASONIC MOTORS; UNIT VOLUME; VOICE COIL MOTORS;

LINEAR ACTUATORS; MICROACTUATORS; PIEZOELECTRIC MOTORS;

PIEZOELECTRICITY;

ARTICLE; ELECTRONICS; EQUIPMENT; EQUIPMENT DESIGN; EQUIPMENT FAILURE; MICROELECTROMECHANICAL SYSTEM; OPTICAL INSTRUMENTATION; TRANSDUCER; ULTRASOUND;

EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; MICRO-ELECTRICAL-MECHANICAL SYSTEMS; MINIATURIZATION; OPTICAL DEVICES; TRANSDUCERS; ULTRASONICS;

EID: 84857024041     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2011.2136     Document Type: Article

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