On the use of shape memory alloy thin films to tune the dynamic response of micro-cantilevers

Journal of Micromechanics and Microengineering

Volumn 20, Issue 1, 2010, Pages

  Kniknie, T ^a   Bellouard, Y ^a   Homburg, E ^a   Nijmeijer, H ^a   Wang, X ^b   Vlassak, J J ^b  

^a EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b HARVARD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DYNAMIC RESPONSE; INTERMETALLICS; MARTENSITIC TRANSFORMATIONS; NANOCANTILEVERS; PHASE TRANSITIONS; SHAPE MEMORY EFFECT;

AFM; HEATING AND COOLING; MARTENSITIC PHASE TRANSFORMATIONS; MICRO-CANTILEVERS; SHAPE MEMORY; SHAPE MEMORY ALLOYS(SMA); SILICON CANTILEVER; THERMOMECHANICAL MODEL;

THIN FILMS;

EID: 84856934403     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/20/1/015039     Document Type: Article

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