A carbon nanotube gas sensor using CMOS-based platform

Proceedings of IEEE Sensors

Volumn , Issue , 2011, Pages 1036-1039

  Tian, Wei Cheng ^a   Kuo, Chun Yen ^a   Hsieh, Chang Jung ^a   Lu, Hung Ling ^b   Lu, Chia Jung ^b  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^b NATIONAL TAIWAN NORMAL UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

A-CARBON; BUTYL ACETATE; CMOS PROCESSS; COMPLEMENTARY METAL OXIDE SEMICONDUCTORS; FAST RESPONSE TIME; HIGH CONCENTRATION; MICRO HOTPLATE; MICROHEATER; POST PROCESS; SENSING MATERIAL; SENSOR PLATFORM; SENSOR SENSITIVITY; STANDARD CMOS PROCESS; STANDARD DEVIATION; TEMPERATURE-PROGRAMMING; THERMAL RESPONSE; UNIFORM HEATING;

ALCOHOLS; CMOS INTEGRATED CIRCUITS; FILM PREPARATION; GAS DETECTORS; MEMS; MICROELECTROMECHANICAL DEVICES; ORGANIC SOLVENTS; POLYSILICON;

CHEMICAL SENSORS;

EID: 84856853167     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2011.6127097     Document Type: Conference Paper

References (12)

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