MEMS relative pressure sensor on flexible substrate

Proceedings of IEEE Sensors

Volumn , Issue , 2011, Pages 460-463

  Ahmed, Moinuddin ^a   Butler, Donald P ^a   Butler, Zeynep Celik ^a  

^a University of Texas at Arlington   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AVERAGE VALUES; FLEXIBLE POLYIMIDE; FLEXIBLE SUBSTRATE; GAUGE FACTORS; MICROMACHINED; NICHROME; NON-PLANAR SURFACES; PIEZO-RESISTIVE; SENSING MATERIAL;

POLYIMIDES;

PRESSURE SENSORS;

EID: 84856839375     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2011.6126932     Document Type: Conference Paper

References (7)

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2. S. K. Patil, Z. Celik-Butler and D. P. Butler, "Piezoresistive polysilicon film obtained by low-temperature aluminum-induced crystallization," Thin Solid Films, vol. 519, pp. 479-486, 2010.
3. W. Thomson, "On the electrodynamic qualities of metals:-effects of magnetization on the conductivity of nickel and of iron," Proc. of the Royal Society of London, vol. 8, pp. 546-550, 1857.
4. P. J. French and A. G. R. Evans, "Piezoresistance in polysilicon and its applications to strain gauges," Solid-State Electron., vol. 32, pp. 1-10, 1989.
5. I. H. Kazi, P. M. Wild, T. N. Moore and M. Sayer, "Characterization of sputtered nichrome films for strain gauge applications, "Thin Solid Films," vol. 515, pp. 2602-2606, 2006.
6. Z. Suo, E. Y. Ma, H. Gleskova and S. Wagner, "Mechanics of rollable and foldable film-on-foil electronics," Appl. Phys. Lett., vol. 74, pp. 1177-1179, 1999.
7. K. Patil, Z. Celik-Butler and D. P. Butler, "Nanocrystalline piezoresistive polysilicon film by aluminum-induced crystallization for pressure sensing applications," IEEE Trans. Nanotech., vol. 9, no. 5, pp. 640-646, 2010.