Improving the measurement sensitivity of interdigital dielectric capacitors (IDC) by optimizing the dielectric property of the homogeneous passivation layer

Sensors and Actuators, B: Chemical

Volumn 162, Issue 1, 2012, Pages 418-424

  Jungreuthmayer, Christian ^a,b   Birnbaumer, Gerald M ^a   Ertl, Peter ^a   Zanghellini, Jürgen ^b  

^a AIT AUSTRIAN INSTITUTE OF TECHNOLOGY   (Austria)

^b AUSTRIAN CENTRE OF INDUSTRIAL BIOTECHNOLOGY   (Austria)

Author keywords

Capacitance; IDC; Interdigiated dielectric capacitors; Optimization; Passivation layer; Permittivity; Sensitivity

Indexed keywords

DIELECTRIC CAPACITORS; DIELECTRIC SENSORS; FREQUENCY-DEPENDENT; IDC; INTERDIGITAL; KEY COMPONENT; LAB-ON-A-CHIP DEVICES; MEASUREMENT SENSITIVITY; PASSIVATION LAYER; SENSITIVITY; SIMPLE METHOD;

CAPACITANCE; CAPACITORS; DIELECTRIC DEVICES; OPTIMIZATION; PERMITTIVITY;

PASSIVATION;

EID: 84856715086     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2011.12.009     Document Type: Article

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