Electrical conductivity and optical properties of thin carbon films grown from ethanol vapor

Inorganic Materials

Volumn 48, Issue 1, 2012, Pages 34-39

  Sedlovets, D M ^a   Red'kin, A N ^a   Korepanov, V I ^a   Trofimov, O V ^a  

^a INSTITUTE OF MICROELECTRONICS TECHNOLOGY AND HIGH PURITY MATERIALS   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON DEPOSITION; CATALYTIC PROCESS; CONDUCTIVE CARBON; COPPER SUBSTRATES; COPPER SURFACE; DEPOSITION TEMPERATURES; DIFFERENT MECHANISMS; ELECTRICAL CONDUCTIVITY; ETHANOL VAPOR; KEY FEATURE; PYROLYSIS TEMPERATURE; REDUCED PRESSURE; SELECTIVE GROWTH; THIN CARBON FILMS; ULTRA-THIN;

CARBON; CARBON FILMS; COPPER; ELECTRIC CONDUCTIVITY; ETHANOL; OPTICAL PROPERTIES;

VAPORS;

EID: 84856553265     PISSN: 00201685     EISSN: 16083172     Source Type: Journal    
DOI: 10.1134/S0020168511120168     Document Type: Article

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