EFAB™ technology and applications

MEMS: Design and Fabrication

Volumn , Issue , 2005, Pages 6-

  Kruglick, Ezekiel J J ^a   Cohen, Adam L ^a   Bang, Christopher A ^a  

^a MICROFABRICA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84856500377     PISSN: None     EISSN: None     Source Type: Book    
DOI: None     Document Type: Chapter

References (5)

1. Chen, R.T., Brown, E.R., and Bang, C.A. (2004) "A Compact Low-Loss Ka-Band Filter Using 3-Dimensional Micromachined Integrated Coax," in Proc. IEEE International Conference on Micro Electro Mechanical Systems, 25-29 January, pp. 801-4.
2. Cohen, A.L., Zhang, G., Tseng, F.G., Frodis, U., Mansfeld, F., and Will, P.M. (1999) "EFAB: Rapid, Low-Cost Desktop Micromachining of High Aspect Ratio True 3-D MEMS," Technical Digest, 12th IEEE International Conference on Microelectromechanical Systems, 17-21 January, Orlando, Florida, pp. 244-51.
3. Reid, J., and Webster, R. (2004) "A 60 GHz Branch Line Coupler Fabricated Using Integrated Rectangular Coaxial Lines," in IEEE MTT-S International Microwave Symposium, 6-11 June, pp. 441-44.
4. Schlesinger, M., and Paunovic, M., eds. (2000) Modern Electroplating, John Wiley & Sons, New York.
5. Vargo, S.E, Wu, C., and Turner, T. (2000), "Reactive Ion Etching of Smooth, Vertical Walls in Silicon," in NASA Tech Briefs, 24, no. 10.