Use of an atomic force microscope for the metrological verification of the reference standards of instrumented indentation tests

Journal of Materials Research

Volumn 27, Issue 1, 2012, Pages 294-301

  Takagi, Satoshi ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Hardness; Nanoindentation; Scanning probe microscopy

Indexed keywords

AFM; AFM IMAGE; AFM OBSERVATION; ANALYTICAL RESULTS; AREA FUNCTION; ATOMIC FORCE MICROSCOPES; CERTIFIED REFERENCE MATERIALS; CERTIFIED VALUES; CONTACT DEPTH; GEOMETRICAL PARAMETERS; GEOMETRY VERIFICATION; INDENTATION HARDNESS; INDENTERS; INSTRUMENTED INDENTATION; MATHEMATICAL METHOD; MEASUREMENT STANDARDS; POLYHEDRAL MODELS; REFERENCE STANDARD; REGRESSION ERRORS; RELATIVE UNCERTAINTY; SCANNING PROBES; UNCERTAINTY OF MEASUREMENT; VICKERS INDENTERS;

ATOMIC FORCE MICROSCOPY; GEOMETRY; HARDNESS; HUMAN ENGINEERING; INDENTATION; NANOINDENTATION; STANDARDS; VICKERS HARDNESS;

UNCERTAINTY ANALYSIS;

EID: 84855612701     PISSN: 08842914     EISSN: 20445326     Source Type: Journal    
DOI: 10.1557/jmr.2011.300     Document Type: Article

References (15)

1. ISO 14577-2: 2002, Metallic materials-Instrumented indentation test for hardness and materials parameters-Part 2:Verification and calibration of testing machines.
2. W.C. Oliver andG.M. Pharr:An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments. J. Mater. Res. 7(6), 1564 (1992).
3. T. Ishibashi, M. Ohki, S. Takagi, Y. Yoshikawa, S. Katayama, S. Iwatsubo, and M. Fujitsuka: Proposal for ISO14577: Metallic materials-instrumented indentation test for hardness and materials parameters-Part 1: Test method (1st. re-evaluation of unloading curve's profile at neighborhood of unloading starting point and discussion of real maximum contact depth). J. Mat. Test. Res. Assoc. Jpn. 56(2), 54 (2011).
4. K. Hasche, K. Herrmann, F. Pohlenz, and K. Thiele: Determination of the geometry of microhardness indenters with a scanning force microscope. Meas. Sci. Technol. 9, 1082 (1998).
5. K. Herrmann, N.M. Jennett, W. Wegener, J. Meneve, K. Hasche and R. Seemann: Progress in determination of the area function of indenters used for nanoindentation. Thin Solid Films 377-378, 394 (2000).
6. S. Takagi, T. Usuda, R. Kongkavitool, and T. Ishibashi: Nanoscale verification of hardness indenters by atomic force microscopy. J. Mat. Test. Res. Assoc. Jpn. 52, 169 (2007).
7. A.C. Fischer-Cripps: The sharpness of a Berkovich indenter. J. Mater. Res. 25, 927 (2010).
8. S. Takagi, K. Hattori, Y. Seino, and H. Nakano: Estimation of effects of indenter-tip geometry by means of finite element analyses of nano-indentation. VDI BERICHITE 1685, 243 (2002).
9. S. Takagi and T. Ishibashi: Analysis of indenter geometry verification data by means of the regression plane fitting, in Proceedings of IMEKO 2010 TC3, TC5 and TC22 Conferences, 133 (2010).
10. Nano-RTM AFM User's Manual. (Pacific Nanotechnology, Inc., Santa Clara, California, 2002).
11. Guide to the Expression of Uncertainty in Measurement: BIPM, IEC, IFCC, ISO, IUPAC, IUPAP,OIML (ISO, Geneva, Switzerland, 1995).
12. S.P. Timoshenko and J.N. Goodier: Theory of Elasticity (McGraw-Hill, New York, 1970).
13. I.N. Sneddon: The relation between load and penetration in the axisymmetric Boussinesq problem for a punch of arbitrary profile. Int. J. Eng. Sci. 3, 47 (1965).
14. T. Ishibashi,M. Ohki, S. Katayama, and S. Takagi: Practical nanoindentation theory and experiments of the pyramidal indenter (7th AFM profiles of Microvickers indenter tip and elastic indentation equations between the hyperboloid of revolution indenter and plane specimen). J. Mat. Test. Res. Assoc. Jpn. 50, 83 (2005).
15. ISO 14577-1: 2002, Metallic materials-Instrumented indentation test for hardness and materials parameters-Part 1: Test method.