Determination of the geometry of microhardness indenters with a scanning force microscope

Measurement Science and Technology

Volumn 9, Issue 7, 1998, Pages 1082-1086

  Hasche, K ^a   Herrmann, K ^a   Pohlenz, F ^a   Thiele, K ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

Indenter; Microhardness; Scanning force microscope

Indexed keywords

CALIBRATION; HARDNESS; MICROSCOPES;

MICROHARDNESS INDENTERS; SCANNING FORCE MICROSCOPES;

MECHANICAL VARIABLES MEASUREMENT;

EID: 0032114462     PISSN: 09570233     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-0233/9/7/013     Document Type: Article

References (9)

1. Bartzke K, Grunewald U and Preuß W 1994 Nanometer structure measurements with the VERITEKT-3 1994 Zeiss Information mit Jenaer Rundschau 4 10-12 (in German)
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3. Hasche K, Jusko O, Koenders L, Thiele K, Wilkening G and Zhao X 1996 Scanning probe microscopes for dimensional length measurements Proc. Eleventh Annual Meeting of ASPE (Monterey, California, 9-14 November) (Raleigh: American Society for Precision Engineering) pp 369-74
4. Dengel D 1989 Auswirkung einer Spitzenverrundung des Prüfdiamanten auf die Mikrohärte unter Prüfkraft 1989 Materialprüfung 31 227-9
5. Weiler W and Behncke H-H 1990 Anforderungen an Eindringkörper für die Universalhärte Materialprüfung 32 301-3
6. Dengel D 1988 Auswirkungen einer Dachkante auf die Mikrohärte nach Vickers und Knoop Materialprüfung 30 184-6
7. DIN 50359-1: Testing of metallic materials - Universal hardness testing-part 1: Test method
8. BIPM/IEC/IFCC/ISO/IUPAC/IUPAP/OIML 1995 Guide to the Expression of Uncertainty in Measurement 2nd edn (Geneva: International Organization for Standardization)
9. Behncke H-H 1995 Load-indentor displacement hardness test: precision of the test method VDI Ber. 1194 33-46