Mass-loaded cantilevers with suppressed higher-order modes for magnetic resonance force microscopy

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 2, Issue , 2003, Pages 1120-1123

  Chui, B W ^a   Hishinuma, Y ^b   Budakian, R ^a   Mamin, H J ^a   Kenny, T W ^b   Rugar, D ^a  

^a IBM ALMADEN RESEARCH CENTER   (United States)

^b Stanford University   (United States)

Author keywords

Electron microscopy; Fabrication; Force measurement; Frequency; Magnetic force microscopy; Magnetic noise; Magnetic resonance; Noise reduction; Silicon; Testing

Indexed keywords

ACTUATORS; ELECTRON MICROSCOPY; ELECTROSPINNING; FABRICATION; FORCE MEASUREMENT; MAGNETIC FORCE MICROSCOPY; MAGNETIC MOMENTS; MAGNETIC RESONANCE; MAGNETISM; MICROSYSTEMS; NANOCANTILEVERS; NOISE ABATEMENT; RESONANCE; SILICON; SILICON WAFERS; SINGLE CRYSTALS; SOLID-STATE SENSORS; SPIN DYNAMICS; TESTING; TRANSDUCERS;

FABRICATION PROCESS; FREQUENCY; HIGHER-ORDER MODES; LOW TEMPERATURES; MAGNETIC NOISE; MAGNETIC RESONANCE FORCE MICROSCOPY; SELECTIVE SILICON EPITAXY; SINGLE CRYSTAL SILICON CANTILEVERS;

ELECTRON SPIN RESONANCE SPECTROSCOPY;

EID: 84855311197     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1216966     Document Type: Conference Paper

References (8)

1. "Magnetic resonance force microscopy," J.A. Sidles, J.L. Garbini, K.J. Bruland, D. Rugar, O. Zuger, S. Hoen, and C.S. Yannoni, Rev. Mod. Phys., 67 (1), pp. 249-65, 1995.
2. "Attonewton force detection using ultrathin silicon cantilevers," T.D. Stowe, K. Yasumura, T.W. Kenny, D. Botkin, K. Wago, and D. Rugar, Appl. Phys. Lett., 71 (2), pp, 288-90, 1997.
3. "Sub-attonewton force detection at milliKelvin temperatures," H.J. Mamin, D. Rugar, Appl. Phys. Lett., 79 (20), pp. 3358-60, 2001.
4. J.A. Sidles, personal communication.
5. "Spin relaxation in MRFM experiments," D. Mozyrsky, I. Martin, D. Pelekhov, and P.C. Hammel, to be published.
6. "Spin relaxation caused by thermal excitations of high-frequency modes of cantilever vibrations," G.P. Berman, V.N. Gorshkov, D. Rugar, and V.I. Tsifrinovich, to be published.
7. "Torsional force probes optimized for higher order mode suppression," T.D. Stowe, K. Yasumura, T. Pfafman, T.W. Kenny, D. Botkin, and D. Rugar, Transducers '97 Tech. Digest, pp. 141-4.
8. Paper in preparation, H.J. Mamin, R. Budakian, B.W. Chui, and D. Rugar, to be submitted to Phys. Rev. Lett.