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Volumn 1, Issue , 1997, Pages 141-144
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Torsional force probes optimized for higher order mode suppression
a a a a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
COMPOSITE MICROMECHANICS;
FEEDBACK CONTROL;
OPTIMIZATION;
SILICON NITRIDE;
THERMAL NOISE;
TORSIONAL STRESS;
HIGHER ORDER MODE SUPPRESSION;
TORSIONAL FORCE PROBES;
SENSORS;
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EID: 0030650553
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (3)
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References (12)
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