Work function effects of ZnO thin film for acetone gas detection

Ceramics International

Volumn 38, Issue SUPPL. 1, 2012, Pages

  Yoon, Young Soo ^a   Jee, Seung Hyun ^a   Kakati, Nitul ^a   Maiti, Jatindranath ^a   Kim, Dong Joo ^b   Lee, Seok Hee ^a   Yoon, Hyon Hee ^c  

^a Yonsei University   (South Korea)

^b AUBURN UNIVERSITY   (United States)

^c Gachon University College of Medicine   (South Korea)

Author keywords

B. Surfaces; C. Electrical properties; D. ZnO; E. Sensors

Indexed keywords

ACETONE GAS; ALUMINA SUBSTRATES; D. ZNO; DEPOSITION CONDITIONS; ELECTRICAL PROPERTY; MICRO-HEATERS; MICROHEATER; OXYGEN ATOM; RADIO FREQUENCY MAGNETRON SPUTTERING; RF-POWER; SUBSTRATE TEMPERATURE; ZNO; ZNO THIN FILM;

ACETONE; ALUMINA; BINDING ENERGY; DEPOSITION; ELECTRIC PROPERTIES; GAS DETECTORS; MAGNETRON SPUTTERING; METALLIC FILMS; OPTICAL FILMS; PLASMA DEPOSITION; PLASMAS; RUTHENIUM ALLOYS; RUTHENIUM COMPOUNDS; SENSORS; SUBSTRATES; THIN FILMS; VAPOR DEPOSITION; WORK FUNCTION;

ZINC OXIDE;

EID: 84655167757     PISSN: 02728842     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ceramint.2011.05.128     Document Type: Conference Paper

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