Study of the formation processes of gold droplet arrays on Si substrates by high temperature anneals

Nanoscale Research Letters

Volumn 6, Issue 1, 2011, Pages

  Klimovskaya, Alla ^a   Sarikov, Andrey ^a   Pedchenko, Yury ^a   Voroshchenko, Andrey ^a   Lytvyn, Oksana ^a   Stadnik, Alexandr ^a  

^a INSTITUTE OF SEMICONDUCTOR PHYSICS   (Ukraine)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; DISTRIBUTION FUNCTIONS; DROPS; FILM PREPARATION; GOLD DEPOSITS; METALLIC FILMS; MORPHOLOGY; GOLD; GOLD COATINGS; SEMICONDUCTING SILICON COMPOUNDS; SILICON; SILICON WAFERS;

ANNEALING REGIMES; ANNEALING TEMPERATURES; DROPLET ARRAYS; FORMATION PROCESS; FURNACE ANNEALING; HIGH-TEMPERATURE ANNEALS; SI SUBSTRATES; WAFER SURFACE; GOLD FILM; SI WAFER;

SILICON WAFERS; FILM PREPARATION;

EID: 84255204745     PISSN: 19317573     EISSN: 1556276X     Source Type: Journal    
DOI: 10.1186/1556-276X-6-151     Document Type: Article

References (9)

1. Wagner RS, Ellis WC: Vapor-Liquid-Solid Mechanism of Single Crystal Griowth. Appl Phys Lett 1964, 4:89.
2. Kwak DW, Cho HY, Yang W-C: Dimensional Evolution of Silicon Nanowires Synthesized by Au-Si Island-Catalyzed Chemical Vapor Deposition. Physica E 2007, 37:153.
3. Ozaki N, Ohno Y, Takeda S: Silicon Nanowhiskers Grown on a Hydrogen-Terminated Silicon {111} Surface. Appl Phys Lett 1998, 73:3700.
4. Hibino H, Watanabe Y: Arrangement of Au-Si Alloy Islands at Atomic Steps. Surf Sci 2005, 588:L233.
5. Liu ZQ, Xie SS, Zhou WY, Sun LF, Li YB, Tang DS, Zou XP, Wang CY, Wang G: Catalytic Synthesis of Straight Silicon Nanowires Over Fe Containing Silica Gel Substrates by Chemical Vapor Deposition. J Cryst Growth 2001, 224:230.
6. Kramer A, Boeck T, Schramm P, Fornari R: Investigation of Au and In as Solvents for the Growth of Silicon Nanowires on Si(1 1 1). Physica E 2008, 40:2462.
7. Martinez-Gil A, Rota A, Maroutian T, Bartenlian B, Beauvillain P, Moyen E, Hanbücken M: Nano-Patterned Silicon Surfaces for the Self-Organised Growth of Metallic Nanostructures. Superlatt Microstruct 2004, 36:235.
8. Ren ZF, Huang ZP, Xu JW, Wang JH, Bush P, Siegal MP, Provencio PN: Synthesis of Large Arrays of Well-Aligned Carbon Nanotubes on Glass. Science 1998, 282:1105.
9. Griffiths H, Xu C, Barrass T, Cooke M, Iacopi F, Vereecken P, Esconjauregui S: Plasma Assisted Growth of Nanotubes and Nanowires. Surf Coat Technol 2007,201:9215.