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Journal of Vacuum Science and Technology B

Volumn 29, Issue 6, 2011, Pages

Graphitic carbon film formation under Ni templates by radio-frequency sputtering for transparent electrode applications

(6) Lin, Meng Yu a Sheng, Yung Shuan b Chen, Shu Han c Su, Ching Yuan c Li, Lain Jong c Lin, Shih Yen b,c,d

a NATIONAL TAIWAN UNIVERSITY (Taiwan)

b NATIONAL TAIWAN OCEAN UNIVERSITY (Taiwan)

c RESEARCH CENTER FOR APPLIED SCIENCES (Taiwan)

d NATIONAL CHIAO TUNG UNIVERSITY (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

FILM PREPARATION; RADIO WAVES; SPUTTERING; TRANSPARENT ELECTRODES;

ALTERNATE APPROACHES; ANNEALING PROCEDURES; CARBON PRECIPITATION; FILM DEPOSITION; GRAPHITIC CARBON FILMS; HIGH-TEMPERATURE ANNEALING; PATTERN FORMATION; RADIO FREQUENCY SPUTTERING;

CARBON FILMS;

EID: 84255190047 PISSN: 21662746 EISSN: 21662754 Source Type: Journal
DOI: 10.1116/1.3646481 Document Type: Article

Times cited : (3)

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