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Volumn 51, Issue 5 III, 2004, Pages 2872-2879

New Monte Carlo calculations of charged particle track-structure in silicon

Author keywords

Dielectric response theory; Dose radial distribution; Inelastic atomic ion scattering; Ion induced prompt electric field; Straggling

Indexed keywords

COMPUTER SIMULATION; COSMIC RAYS; ELECTRIC FIELDS; ELECTRONS; ENERGY TRANSFER; MATHEMATICAL MODELS; MONTE CARLO METHODS; PROBABILITY;

EID: 8344252095     PISSN: 00189499     EISSN: None     Source Type: Journal    
DOI: 10.1109/TNS.2004.835061     Document Type: Article
Times cited : (29)

References (27)
  • 1
    • 36049055816 scopus 로고
    • Energy deposition by electron beams and δ rays
    • E. J. Kobetich and R. Katz, "Energy deposition by electron beams and δ rays," Phys. Rev., vol. 170, pp. 391-396, 1968.
    • (1968) Phys. Rev. , vol.170 , pp. 391-396
    • Kobetich, E.J.1    Katz, R.2
  • 2
    • 0003495184 scopus 로고    scopus 로고
    • Heavy ion track-structure calculations for radial dose in arbitrary materials
    • Feb.
    • F. A. Cucinotta, R. Katz, J. W. Wilson, and R. R. Dubey, "Heavy ion track-structure calculations for radial dose in arbitrary materials," NASA Technical Mem. 3497, Feb. 1995.
    • NASA Technical Mem. , vol.3497 , pp. 1995
    • Cucinotta, F.A.1    Katz, R.2    Wilson, J.W.3    Dubey, R.R.4
  • 3
    • 0036947519 scopus 로고    scopus 로고
    • Ion-track structure and its effects in small size volume of silicon
    • Dec.
    • A. Akkerman and J. Barak, "Ion-track structure and its effects in small size volume of silicon," IEEE Trans. Nucl. Sci., vol. 49, pp. 3022-3031, Dec. 2002. and correction: IEEE Trans. Nucl. Sci., vol. 50, pp. 741, June, 2003.
    • (2002) IEEE Trans. Nucl. Sci. , vol.49 , pp. 3022-3031
    • Akkerman, A.1    Barak, J.2
  • 4
    • 0036947519 scopus 로고    scopus 로고
    • Correction
    • June
    • A. Akkerman and J. Barak, "Ion-track structure and its effects in small size volume of silicon," IEEE Trans. Nucl. Sci., vol. 49, pp. 3022-3031, Dec. 2002. and correction: IEEE Trans. Nucl. Sci., vol. 50, pp. 741, June, 2003.
    • (2003) IEEE Trans. Nucl. Sci. , vol.50 , pp. 741
  • 5
    • 0004124599 scopus 로고    scopus 로고
    • NIST electron elastic-scattering cross-section database
    • and version 2, (srdata@nist.gov)
    • A. Jablonski and C. J. Powell, NIST electron elastic-scattering cross-section database, in NIST Standard Reference Database, vol. 64. 2000, and version 2, (srdata@nist.gov).
    • (2000) NIST Standard Reference Database , vol.64
    • Jablonski, A.1    Powell, C.J.2
  • 7
    • 0030375311 scopus 로고    scopus 로고
    • Inelastic electron interactions in the energy range 50 eV to 10 keV in insulators: Alkali halides and metal oxides
    • A. Akkerman, T. Boutboul, A. Breskin, R. Chechik, A. Gibrekhterman, and Y. Lifshitz, "Inelastic electron interactions in the energy range 50 eV to 10 keV in insulators: Alkali halides and metal oxides," Phys. Stat. Sol. (b), vol. 198, pp. 769-784, 1996.
    • (1996) Phys. Stat. Sol. (b) , vol.198 , pp. 769-784
    • Akkerman, A.1    Boutboul, T.2    Breskin, A.3    Chechik, R.4    Gibrekhterman, A.5    Lifshitz, Y.6
  • 8
    • 0036818143 scopus 로고    scopus 로고
    • Dynamics of solid inner-shell electrons in collisions with bare and dressed swift ions
    • C. C. Montanari, J. E. Miraglia, and N. R. Arista, "Dynamics of solid inner-shell electrons in collisions with bare and dressed swift ions," Phys. Rev. A, vol. 66, pp. 042902-042908, 2002.
    • (2002) Phys. Rev. A , vol.66 , pp. 42902-42908
    • Montanari, C.C.1    Miraglia, J.E.2    Arista, N.R.3
  • 10
    • 0003478187 scopus 로고
    • Elastic scattering of electrons and positrons by atoms: Database ELAST
    • M. J. Berger, S. M. Seltzer, R. Wang, and A. Schechter, "Elastic scattering of electrons and positrons by atoms: Database ELAST," in NISTIR, 5188, 1993.
    • (1993) NISTIR , vol.5188
    • Berger, M.J.1    Seltzer, S.M.2    Wang, R.3    Schechter, A.4
  • 11
    • 0024640502 scopus 로고
    • Cross sections for inelastic electron scattering in solids
    • C. J. Powell, "Cross sections for inelastic electron scattering in solids," Ultramicroscopy, vol. 28, pp. 24-31, 1989.
    • (1989) Ultramicroscopy , vol.28 , pp. 24-31
    • Powell, C.J.1
  • 12
    • 0031239729 scopus 로고    scopus 로고
    • Theory of the cross sections for inelastic scattering of electrons by core level excitations in solids
    • D. R. Penn, C. W. Clark, C. J. Powell, T. Fulop, and S. Tanuma, "Theory of the cross sections for inelastic scattering of electrons by core level excitations in solids," Ultramicroscopy, vol. 69, pp. 69-81, 1997.
    • (1997) Ultramicroscopy , vol.69 , pp. 69-81
    • Penn, D.R.1    Clark, C.W.2    Powell, C.J.3    Fulop, T.4    Tanuma, S.5
  • 13
    • 0003982205 scopus 로고
    • ICRU-37, Int. Commission Radiation Units and Measurements, Bethesda, MD
    • ICRU-37, "Stopping Powers for Electrons and Positrons," Int. Commission Radiation Units and Measurements, Bethesda, MD, 1984.
    • (1984) Stopping Powers for Electrons and Positrons
  • 14
    • 0022867936 scopus 로고
    • 60Co gamma rays
    • Dec.
    • 60Co gamma rays," IEEE Trans. Nucl. Sci., vol. 33, pp. 1236-1239, Dec. 1986.
    • (1986) IEEE Trans. Nucl. Sci. , vol.33 , pp. 1236-1239
    • Hamm, R.N.1
  • 15
    • 0033897940 scopus 로고    scopus 로고
    • An event-by-event computer simulation of interactions of energetic charged particles and all their secondary electrons in water
    • D. Emfietzoglou, G. Papamichael, and M. Moscovitch, "An event-by-event computer simulation of interactions of energetic charged particles and all their secondary electrons in water," J. Phys. D: Appl. Phys., vol. 33, pp. 932-944, 2000.
    • (2000) J. Phys. D: Appl. Phys. , vol.33 , pp. 932-944
    • Emfietzoglou, D.1    Papamichael, G.2    Moscovitch, M.3
  • 16
    • 0000854030 scopus 로고
    • Distribution of radial energy deposition around the track of energetic charged particles in silicon
    • O. Fageeha, J. Howard, and R. C. Block, "Distribution of radial energy deposition around the track of energetic charged particles in silicon," J. Appl. Phys., vol. 75, pp. 2317-2321, 1994.
    • (1994) J. Appl. Phys. , vol.75 , pp. 2317-2321
    • Fageeha, O.1    Howard, J.2    Block, R.C.3
  • 17
    • 0000883655 scopus 로고
    • Applicability of LET to single events in microelectronic structures
    • Dec.
    • M. A. Xapsos, "Applicability of LET to single events in microelectronic structures," IEEE Trans. Nucl. Sci., vol. 39, pp. 1613-1621, Dec. 1992.
    • (1992) IEEE Trans. Nucl. Sci. , vol.39 , pp. 1613-1621
    • Xapsos, M.A.1
  • 19
    • 0001754981 scopus 로고
    • Reduction of secondary-electron yields by collective electric fields within metals
    • J. E. Borovsky and D. M. Suszcynsky, "Reduction of secondary-electron yields by collective electric fields within metals," Phys. Rev. A, vol. 43, pp. 1433-1440, 1991.
    • (1991) Phys. Rev. A , vol.43 , pp. 1433-1440
    • Borovsky, J.E.1    Suszcynsky, D.M.2
  • 20
    • 0001108858 scopus 로고
    • Electron-emission yield of Al, Cu, and Au for impact of swift bare light ions
    • O. Benka, A. Schinner, T. Fink, and M. Pfaffenlehner, "Electron-emission yield of Al, Cu, and Au for impact of swift bare light ions," Phys. Rev. A, vol. 52, pp. 3959-3965, 1995.
    • (1995) Phys. Rev. A , vol.52 , pp. 3959-3965
    • Benka, O.1    Schinner, A.2    Fink, T.3    Pfaffenlehner, M.4
  • 22
    • 0042785718 scopus 로고
    • Electron ejection induced by fast projectiles
    • R. A. Baragiola, Ed. New York: Plenum
    • G. Schiwietz, "Electron ejection induced by fast projectiles," in Ionization of Solids by Heavy Particles, R. A. Baragiola, Ed. New York: Plenum, 1993, pp. 197-214.
    • (1993) Ionization of Solids by Heavy Particles , pp. 197-214
    • Schiwietz, G.1
  • 23
    • 0001088760 scopus 로고
    • Track effects and their influence on heavy ion energy losses in semiconductor devices
    • R. A. Baragiola, Ed. New York: Plenum
    • A. Akkerman, J. Levinson, D. Ilberg, and Y. Lifshitz, "Track effects and their influence on heavy ion energy losses in semiconductor devices," in Ionization of Solids by Heavy Particles, R. A. Baragiola, Ed. New York: Plenum, 1993, pp. 431-438.
    • (1993) Ionization of Solids by Heavy Particles , pp. 431-438
    • Akkerman, A.1    Levinson, J.2    Ilberg, D.3    Lifshitz, Y.4
  • 25
    • 0024169257 scopus 로고
    • Charge collection in silicon for ions of different energy but same linear energy transfer (LET)
    • Dec.
    • W. J. Stapor, P. T. McDonald, A. R. Knudson, A. B. Campbell, and B. G. Glagola, "Charge collection in silicon for ions of different energy but same linear energy transfer (LET)," IEEE Trans. Nucl. Sci., vol. 35, pp. 1585-1590, Dec. 1988.
    • (1988) IEEE Trans. Nucl. Sci. , vol.35 , pp. 1585-1590
    • Stapor, W.J.1    McDonald, P.T.2    Knudson, A.R.3    Campbell, A.B.4    Glagola, B.G.5


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.