A Fabry-Perot refractometer for chemical vapor sensing by solid-phase microextraction

International Conference on Optical MEMS and Nanophotonics

Volumn , Issue , 2011, Pages 85-86

  St Gelais, R ^a   Mackey, G ^b   Saunders, J ^b   Zhou, J ^b   Leblanc Hotte, A ^a   Poulin, A ^a   Barnes, J A ^b   Loock, H P ^b   Brown, R S ^b   Peter, Y A ^a  

^a ÉCOLE POLYTECHNIQUE DE MONTRÉAL   (Canada)

^b QUEEN S UNIVERSITY   (Canada)

Author keywords

Chemical sensors; Fabry Perot; Microfluidics; Microoptics; Optical device fabrication; Optical sensors

Indexed keywords

ANALYTES; CHEMICAL VAPOR; CONTOUR-LITHOGRAPHY METHOD; DETECTION LIMITS; FABRICATION YIELD; FABRY-PEROT; MAXIMUM SENSITIVITY; OPTICAL DEVICE FABRICATION; POLYDIMETHYLSILOXANE PDMS; REFRACTIVE INDEX SENSOR; SOLID-PHASE MICROEXTRACTION;

CHEMICAL SENSORS; FABRY-PEROT INTERFEROMETERS; LITHOGRAPHY; MICROFLUIDICS; MICROOPTICS; MOEMS; NANOPHOTONICS; OPTICAL SENSORS; PLASTIC COATINGS; POLYMERS; REFRACTIVE INDEX; SENSORS; SILICONES; VAPORS; XYLENE;

EXTRACTION;

EID: 82955193780     PISSN: 21605033     EISSN: 21605041     Source Type: Conference Proceeding    
DOI: 10.1109/OMEMS.2011.6031012     Document Type: Conference Paper

References (5)

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5. R. St-Gelais, A. Poulin and Y.-A. Peter, "Effects of divergence and surface roughness in in-plane deeply etched multilayer resonators," in preparation.