High-speed MEMS micromirror switching

Conference on Lasers and Electro-Optics, 2007, CLEO 2007

Volumn , Issue , 2007, Pages

  Nielson, Gregory N ^a   Olsson III, Roy H ^a   Resnick, Paul R ^a   Spahn, Olga Blum ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

HIGH-SPEED; MEMS MICROMIRROR; MICRO MIRROR; PERFORMANCE CHARACTERISTICS; REPETITION RATE;

MICROELECTROMECHANICAL DEVICES;

MEMS;

EID: 82955163976     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/CLEO.2007.4452612     Document Type: Conference Paper

References (6)

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2. D. S. Greywall, et al., "Crystalline silicon tilting mirrors for optical cross-connect switches," JMEMS 12, 708-712 (2003).
3. J.-C. Tsai and M. C. Wu, "Gimbal-less MEMS two-axis optical scanner array with high fill-factor," JMEMS 14, 1323-1328 (2005).
4. A. Steane, "How to build a 300 bit, 1 Giga-operation quantum computer," arXiv.org /abs/quant-ph/0412165, 1-13 (2006).
5. G. N. Nielson and G. Barbastathis, "Dynamic pull-in of parallel-plate and torsional electrostatic MEMS actuators," JMEMS 15, 811-821 (2006).
6. G. N. Nielson, "Micro-Opto-Mechanical Switching and Tuning for Integrated Optical Systems," Ph.D. dissertation, Dept. Mech. Eng., MIT, Cambridge, MA, 2004.