The effect of surface modification and catalytic metal contact on methane sensing performance of nano-ZnO-Si heterojunction sensor

Microelectronics Reliability

Volumn 51, Issue 12, 2011, Pages 2185-2194

  Bhattacharyya, P ^a   Mishra, G P ^b   Sarkar, S K ^c  

^a INDIAN INSTITUTE OF ENGINEERING SCIENCE AND TECHNOLOGY   (India)

^b SIKSHA O ANUSANDHAN DEEMED TO BE UNIVERSITY   (India)

^c JADAVPUR UNIVERSITY   (India)

Author keywords

[No Author keywords available]

Indexed keywords

CATALYTIC METALS; HETEROJUNCTION DEVICES; HETEROJUNCTION STRUCTURES; METHANE SENSING; NANO-POROUS; NANOCRYSTALLINES; NON-CATALYTIC; OPERATING TEMPERATURE; OPERATING VOLTAGE; PALLADIUM NANOCLUSTERS; RESPONSE MAGNITUDE; SURFACE-MODIFIED; ZNO; ZNO FILMS;

METHANE; PALLADIUM; SENSORS; SILVER; TEMPERATURE; ZINC OXIDE;

HETEROJUNCTIONS;

EID: 81955168102     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.microrel.2011.04.018     Document Type: Article

References (21)

1. A.M. Azad, S.A. Akbar, S.G. Mhaisalkar, L.D. Birkefeld, and K.S. Goto Solid-state gas sensors: a review J Electrochem Soc 139 1992 3690 3703
2. 2 thick films Sens Actuators B 105 2005 346 350
3. 2/Os thin film for the detection of methane at low temperature Sens Actuators B 58 1999 350 355 (Pubitemid 30529494)
4. J.C. Kim, H.K. Jun, J.S. Huh, and D.D. Lee Tin oxide-based methane gas sensor promoted by alumina-supported Pd catalyst Sens Actuators B 45 1997 271 277 (Pubitemid 127434781)
5. 3 thin films based on temperature switching of multigas reactions Sens Actuators B 25 1995 544 547
6. J. Wollenstein, M. Burgmair, G. Plescher, T. Sulima, J. Hildenbrand, and H. Bottner Cobalt oxide based gas sensors on silicon substrate for operation at low temperatures Sens Actuators B 93 2003 442 448
7. S.M. Lee, D.C. Dyer, and J.W. Gardner Design and optimisation of a high-temperature silicon micro-hotplate for nanoporous palladium pellistors Microelectron J 34 2003 115 126
8. P. Bhattacharyya, P.K. Basu, C. Lang, H. Saha, and S. Basu Noble metal catalytic contacts to sol-gel nanocrystalline zinc oxide thin films for sensing methane Sens Actuators B 129 2008 551 557 (Pubitemid 351221263)
9. P. Bhattacharyya, P.K. Basu, H. Saha, and S. Basu Fast response methane sensor using nanocrystalline zinc oxide thin films derived by sol-gel method Sens Actuators B 124 2007 62 67 (Pubitemid 46754815)
10. P.K. Basu, P. Bhattacharyya, N. Saha, H. Saha, and S. Basu The superior performance of the electrochemically grown ZnO thin films as methane sensor Sens Actuators B 133 2008 357 363
11. P.K. Basu, S.K. Jana, H. Saha, and S. Basu Low temperature methane sensing by electrochemically grown and surface modified ZnO thin films Sens Actuators B 135 2008 81 88
12. P. Bhattacharyya, S. Maji, S. Biswas, A. Sengupta, T. Maji, and H. Saha Palladium Surface modification of Nanocrystalline Sol-Gel derived Zinc Oxide Thin Films and its Effect on Methane Sensing Sens Transducers J 110 2009 38 46
13. G.P. Mishra, A. Sengupta, S. Maji, S.K. Sarkar, and P. Bhattacharyya The effect of catalytic metal contact on methane sensing performance of nanoporous ZnO-Si heterojunction Int J Smart Sensing Intell Syst 3 2010 292 303
14. P. Bhattacharyya, P.K. Basu, N. Mukherjee, A. Mondal, H. Saha, and S. Basu Deposition of nanocrystalline ZnO thin films on p-Si by novel galvanic method and application of the heterojuncion as methane Sensor J Mater Sci Mater Electron 18 2007 823 829 (Pubitemid 46876304)
15. S. Basu, and P.K. Basu Nanocrystalline metal oxides for Methane sensors: role of Nobel Metals J Sens 861968 2009 1 20
16. P.K. Basu, N. Saha, S.K. Jana, H. Saha, A. Lloyd Spetz, and S. Basu Schottky junction methane sensors using electrochemically grown nanocrystalline-nonporous ZnO thin films J Sens 790476 2009 1 9
17. 2 J Electrochem Soc 58 1990 143 1149
18. 4 gas mixtures by using a micromachined sensor array Sens Actuators B 78 2001 40 48 (Pubitemid 32746192)
19. J. Kanungo, H. Saha, and S. Basu Pd sensitized porous silicon hydrogen sensor - Influence of ZnO thin film Sens Actuators B 147 2010 128 136
20. 2 sensors with high and fast response Sens Actuators B 140 2009 412 417
21. H. Zhang, R.L. Penn, R.J. Hamers, and J.F. Banfield Enhanced adsorption of molecules on surfaces of nanocrystalline particles J Phys Chem B 103 1999 4656 4662 (Pubitemid 129702630)