Surface acoustic wave-based gas sensors

Thin Solid Films

Volumn 520, Issue 3, 2011, Pages 986-993

  Jakubik, Wiesław P ^a  

^a SILESIAN UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

Gas sensor; Layered films; Rayleigh wave; Surface acoustic wave

Indexed keywords

LAYERED FILMS; OSCILLATOR SYSTEMS; RAYLEIGH; SENSOR STRUCTURES; SURFACE ACOUSTIC WAVE; SURFACE ACOUSTIC WAVES;

ACOUSTIC SURFACE WAVE DEVICES; ACOUSTICS; ACOUSTOELECTRIC EFFECTS; CHEMICAL SENSORS; GAS DETECTORS;

ACOUSTIC WAVES;

EID: 81855194042     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2011.04.174     Document Type: Conference Paper

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