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Volumn 2, Issue , 2011, Pages 269-272
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Copper displacement deposition on nanostructured porous silicon
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Author keywords
Copper; Displacement deposition; Porous silicon
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Indexed keywords
CRYSTALLOGRAPHIC ORIENTATIONS;
CU DEPOSITION;
CU FILMS;
CU NANOPARTICLES;
DISPLACEMENT METHOD;
ELECTRICAL CONDUCTIVITY;
NANO-SIZED CRYSTALS;
NANO-STRUCTURED;
NANOSIZED OBJECTS;
POROUS SILICON LAYERS;
POROUS SILICON SURFACES;
COPPER;
ELECTRIC CONDUCTIVITY;
FLUIDICS;
HYDROFLUORIC ACID;
NANOTECHNOLOGY;
POROUS SILICON;
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EID: 81455140686
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (3)
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References (6)
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