The ethanol sensing property of magnetron sputtered ZnO thin films modified by Ag ion implantation

Sensors and Actuators, B: Chemical

Volumn 160, Issue 1, 2011, Pages 1499-1503

  Chen, Jiangtao ^a   Yan, Xingbin ^a   Liu, Wenwen ^a   Xue, Qunji ^a  

^a LANZHOU INSTITUTE OF CHEMICAL PHYSICS   (China)

Author keywords

Ethanol gas sensor; Ion implantation; Magnetron sputtering; ZnO film

Indexed keywords

CATALYTIC REACTIONS; CHEMICAL ADSORPTION; ETHANOL SENSING; IMPLANTATION DOSE; ION IMPLANTED; NANO GRAINS; SENSING PROPERTY; SENSING RESPONSE; ZNO; ZNO FILM; ZNO FILMS; ZNO THIN FILM;

ADSORPTION; CATALYSIS; CHEMICAL SENSORS; ETHANOL; GAS DETECTORS; ION IMPLANTATION; IONS; MAGNETRON SPUTTERING; METALLIC FILMS; SURFACE REACTIONS; ZINC OXIDE;

SILVER;

EID: 81155149893     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2011.08.026     Document Type: Article

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