Thickness determination of thin anodic titanium oxide films-a comparison between coulometry and reflectometry

Surface and Interface Analysis

Volumn 43, Issue 12, 2011, Pages 1471-1479

  Schneider, M ^a   Langklotz, U ^b   Michaelis, A ^a,b  

^a FRAUNHOFER INSTITUTE FOR CERAMIC TECHNOLOGIES AND SYSTEMS   (Germany)

^b DRESDEN UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

anodic oxide films; microcapillary cell technique; reflectometry; Ti; TiAlV6 4

Indexed keywords

ANODIC OXIDE FILM; ANODIC TITANIUM OXIDES; CORRECTION ALGORITHMS; CURRENT EFFICIENCY; FILM PROPERTIES; MICROCAPILLARY CELL; OXIDE FORMATION; OXYGEN EVOLUTION; REFLECTOMETRY; RELATIVE PERMITTIVITY; SIDE REACTIONS; SIMPLE METHOD; THICKNESS DETERMINATION; THICKNESS VALUE; TIALV6-4;

ANODIC OXIDATION; REFLECTION; REFLECTOMETERS; TITANIUM; TITANIUM ALLOYS; TITANIUM OXIDES;

OXIDE FILMS;

EID: 80955151860     PISSN: 01422421     EISSN: 10969918     Source Type: Journal    
DOI: 10.1002/sia.3736     Document Type: Article

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