Investigation of thin oxide films on titanium for capacitor applications

Surface and Interface Analysis

Volumn 40, Issue 3-4, 2008, Pages 850-852

  Schroth, S ^a   Schneider, M ^b   Mayer Uhma, T ^a   Michaelis, A ^a,b   Klemm, V ^c  

^a DRESDEN UNIVERSITY OF TECHNOLOGY   (Germany)

^b FRAUNHOFER INSTITUTE FOR CERAMIC TECHNOLOGIES AND SYSTEMS   (Germany)

^c TU BERGAKADEMIE FREIBERG   (Germany)

Author keywords

Coulometry; Cyclovoltammogram; Thickness estimation; Thin oxide film; Titanium

Indexed keywords

CAPACITORS; COULOMETERS; CYCLIC VOLTAMMETRY; ELECTROOXIDATION; PERMITTIVITY; POTENTIODYNAMIC POLARIZATION; THICKNESS MEASUREMENT; THIN FILMS; TITANIUM;

BUFFER SOLUTION; CYCLOVOLTAMMOGRAM; THIN OXIDE FILMS;

OXIDE FILMS;

EID: 42449156831     PISSN: 01422421     EISSN: 10969918     Source Type: Journal    
DOI: 10.1002/sia.2708     Document Type: Conference Paper

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