Fast-response photoconductive metal-semiconductor-metal ultraviolet detector based on ZnO film grown by radio-frequency magnetron sputtering

Optical Engineering

Volumn 47, Issue 6, 2008, Pages

  Bian, Xuming ^a   Zhang, Jingwen ^a   Bi, Zhen ^a   Wang, Dong ^a   Zhang, Xin'An ^a   Hou, Xun ^a  

^a XI'AN JIAOTONG UNIVERSITY   (China)

Author keywords

metal semiconductor metal structures; photoconductive ultraviolet detector; ZnO film

Indexed keywords

FAST RESPONSE; IV CHARACTERISTICS; KRF EXCIMER LASER; LIFTOFF TECHNIQUE; METAL-SEMICONDUCTOR-METAL STRUCTURES; METAL-SEMICONDUCTOR-METAL ULTRAVIOLET DETECTORS; PHOTOCONDUCTIVE ULTRAVIOLET DETECTORS; RADIO-FREQUENCY-MAGNETRON SPUTTERING; ZNO FILMS; ZNO THIN FILM;

DETECTORS; EXCIMER LASERS; METALLIC FILMS; PHOTOCONDUCTIVITY; SEMICONDUCTING SILICON; SILICON COMPOUNDS; ULTRAVIOLET DETECTORS; ZINC OXIDE;

METALS;

EID: 80855164765     PISSN: 00913286     EISSN: 15602303     Source Type: Journal    
DOI: 10.1117/1.2939091     Document Type: Article

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