Fabrication of a needle-type pH sensor by selective electrodeposition

Journal of Micro/Nanolithography, MEMS, and MOEMS

Volumn 10, Issue 2, 2011, Pages

  Choi, Woo Hyuck ^a   Papautsky, Ian ^a  

^a University of Cincinnati   (United States)

Author keywords

Electrochemical sensor; Electrodeposition; MEMS; Microelectrodes; PH sensor

Indexed keywords

ELECTRODEPOSITION; FABRICATION; IONS; IRIDIUM; IRIDIUM COMPOUNDS; MICROELECTRODES; NEEDLES; OXIDE FILMS; PH; SENSORS;

BATCH FABRICATION; BUFFER SOLUTIONS; FABRICATION YIELD; GLASS PIPETTE; IN-SITU; IRIDIUM OXIDES; MICROELECTRODE SENSORS; NERNSTIAN RESPONSE; ON-SITE MEASUREMENT; SELECTIVE ELECTRODEPOSITION; SENSOR TIP;

PH SENSORS;

EID: 80455163261     PISSN: 19325150     EISSN: 19325134     Source Type: Journal    
DOI: 10.1117/1.3580751     Document Type: Article

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