Microscale surface thermometry using SU8/Rhodamine-B thin layer

Sensors and Actuators, A: Physical

Volumn 171, Issue 2, 2011, Pages 228-232

  Jung, Woonseop ^a,c   Kim, Young Won ^a,d   Yim, Dongwook ^a   Yoo, Jung Yul ^a,b  

^a Seoul National University   (South Korea)

^b Seoul National University   (South Korea)

^c Doosan Infracore Co Ltd   (South Korea)

^d Pohang Institute of Metal Industry Advancement (POMIA)   (South Korea)

Author keywords

MEMS; Microscale; Rhodamine B; SU8; Surface thermometry

Indexed keywords

HEAT SOURCES; INDIRECT MEASUREMENT METHOD; INTERROGATION WINDOW; MICRO-SCALES; MICROFLUIDIC CHANNEL; MICROHEATER; RHODAMINE B; SPATIAL ERRORS; SU8; SURFACE TEMPERATURES; SURFACE THERMOMETRY; TEMPERATURE RANGE; TEMPERATURE RESOLUTION; THIN LAYERS; ULTRA-THIN;

DYES; THERMOMETERS; THIN FILMS;

SURFACE MEASUREMENT;

EID: 80055052814     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2011.06.025     Document Type: Article

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