Piezoelectric MEMS resonant gas sensor for defence applications

2011 Defense Science Research Conference and Expo, DSR 2011

Volumn , Issue , 2011, Pages

  Khine, Lynn ^a   Tsai, Julius M ^a   Heidari, Amir ^b   Yoon, Yong Jin ^b  

^a INSTITUTE OF MICROELECTRONICS   (Singapore)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

AlN resonator; gas sensor; MEMS; piezoelectric

Indexed keywords

ALN RESONATORS; DEFENCE APPLICATIONS; GAS SENSOR; GRAVIMETRIC GAS SENSORS; HIGH POTENTIAL; INTER-DIGITATED ELECTRODES; LIMIT OF DETECTION; MASS SENSITIVITY; MULTIPLE FREQUENCY; MULTIPLE LAYERS; PIEZOELECTRIC; PIEZOELECTRIC LAYERS; PIEZOELECTRIC MEMS; POLYELECTROLYTE MULTILAYER; RESONANT GAS; SINGLE WAFER;

GAS DETECTORS; MEMS; NATURAL FREQUENCIES; PIEZOELECTRICITY; RESONATORS;

CHEMICAL SENSORS;

EID: 80053638229     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/DSR.2011.6026862     Document Type: Conference Paper

References (9)

1. P. Ivaldi, J. Abergel, G. Arndt, P. Robert, P. Andreucci, H. Blanc, S. Hentz, and E. Defay, "50 nm thick AlN resonant micro-cantilever for gas sensing application," IEEE Inter. Frequency Control Symposium, pp. 81-84, 2010.
2. R.B. Haskell, J.J. Caron, M.A. Duplisea, J.J. Ouellette and J.F. Vetelino, "Effects of film thickness on sensitivity of SAW mercury sensors," Proc. IEEE Ultrasonics Symposium, pp. 429-434, 1999.
3. T. Thundat, E.A. Wachter, S.L. Sharp, and R.J. Warmack, "Detection of mercury vapor using resonating microcantilevers," Applied Physic Lett., 66, 13, 1995.
4. S. Chopra, A. Pham, J. Gaillard, A. Parker, and A. M. Rao, "Carbon-nanotube-based resonant-circuit sensor for ammonia," Applied Physics Lett., vol. 80, 2002.
5. M. Penza, P. Aversa, G. Cassano, D. Suriano, W. Wlodarski, M. Benetti, D. Cannata, F. Di Pietrantonio, and E. Verona, "Thin-Film Bulk-Acoustic-Resonator Gas Sensor Functionalized With a Nanocomposite Langmuir-Blodgett Layer of Carbon Nanotubes," IEEE Transactions on Electron Devices, pp. 1237-1243, 2008.
6. M. Rinaldi, B. Duick, C. Zuniga, C. Zuo and G. Piazza, "ss-DNA functionalized ultra-thin-film ALN Contour-mode Resonators with self-sustained oscillator for volatile organic chemical detection," IEEE Inter. Conf. on Micro Electro Mechanical Systems, pp. 132-135, 2010.
7. L. Oedberg, S. Sandberg, S. Welin-Klintstroem and H. Arwin "Thickness of adsorbed layers of high molecular weight polyelectrolytes studied by ellipsometry," Langmuir, vol 11(7), pp. 2621-2625, 1995.
8. O.V. Lebedeva, B.S. Kim, K. Vasilev, and O.I. Vinogradova, "Salt softening of polyelectrolyte multilayer microcapsules," J. of Colloid and Interface Science, vol 284(2), pp. 455-462, 2005.
9. Z. Feldötö, I. Varga, and E. Blomberg, "Influence of salt and rinsing protocol on the structure of PAH/PSS polyelectrolyte multilayers," Langmuir, vol 26(22), pp. 17048-17057, 2010.