Including time dependency and ANOVA in decision-making using the revised fuzzy AHP: A case study on wafer fabrication process selection

Applied Soft Computing Journal

Volumn 11, Issue 8, 2011, Pages 5099-5109

  Rajput, Harish C ^a   Milani, Abbas S ^a   Labun, Andrew ^a  

^a UNIVERSITY OF BRITISH COLUMBIA   (Canada)

Author keywords

ANOVA; Fuzzy AHP; Signal to noise ratio; Time dependent MCDM; Wafer machine selection

Indexed keywords

COATING PROCESS; COMPLEX DECISION; DECISION MAKERS; DECISION PROCESS; FINAL DECISION; FUZZY AHP; FUZZY ANALYTIC HIERARCHY PROCESS; MACHINE SELECTION; MULTIPLE CRITERIA DECISION MAKING; ON-WAFER; OPERATION TIME; SIGNAL TO NOISE; STATISTICAL DATAS; STATISTICAL WEIGHTING; TIME DEPENDENCY; TIME-DEPENDENT; WAFER SLICING;

DECISION MAKING; HIERARCHICAL SYSTEMS; SIGNAL TO NOISE RATIO;

ANALYSIS OF VARIANCE (ANOVA);

EID: 80053576548     PISSN: 15684946     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.asoc.2011.05.049     Document Type: Article

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