In-situ large scale deposition of PZT films by RF magnetron sputtering

2011 International Symposium on Applications of Ferroelectrics and 2011 International Symposium on Piezoresponse Force Microscopy and Nanoscale Phenomena in Polar Materials, ISAF/PFM 2011

Volumn , Issue , 2011, Pages

  Kratzer, Martin ^a   Castaldi, Lorenzo ^a   Heinz, Bernd ^a   Mamazza, Robert ^a   Kaden, Dirk ^b   Quenzer, Hans Joachim ^b   Wagner, Bernhard ^b  

^a Balzers AG   (Liechtenstein)

^b FRAUNHOFER INSTITUTE FOR SILICON TECHNOLOGY ISIT   (Germany)

Author keywords

Ferroelectric; in situ deposition; Piezoelectric; PZT; RF magnetron sputtering

Indexed keywords

FERROELECTRIC; IN-SITU DEPOSITION; PIEZOELECTRIC; PZT; RF-MAGNETRON SPUTTERING;

FERROELECTRIC FILMS; FERROELECTRIC MATERIALS; LEAD OXIDE; MAGNETRON SPUTTERING; NANOSTRUCTURED MATERIALS; NANOTECHNOLOGY; PEROVSKITE; PIEZOELECTRICITY; PLATINUM; SILICON OXIDES; STOICHIOMETRY; SUBSTRATES; TITANIUM DIOXIDE; ZIRCONIUM;

FILMS;

EID: 80053364038     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ISAF.2011.6013981     Document Type: Conference Paper

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