메뉴 건너뛰기




Volumn 22, Issue 10, 2011, Pages 1594-1601

LA ICP-MS in microelectronics failure analysis

Author keywords

[No Author keywords available]

Indexed keywords

ANALYTICAL TECHNIQUES; CHEMICAL CHARACTERIZATION; DEVICE FAILURES; ELECTROCHEMICAL MIGRATION; FAILURE MECHANISM; FAULT ISOLATION; FLEXIBLE CIRCUIT; HIGH-DENSITY INTERCONNECTION; HIGHLY INTEGRATED; MANUFACTURING PROCESS; MICROELECTRONICS FAILURE ANALYSIS; ROOT CAUSE; SAMPLE PREPARATION; SPATIAL RESOLUTION; SYSTEM IN PACKAGE; TRACE AMOUNTS;

EID: 80053354379     PISSN: 09574522     EISSN: 1573482X     Source Type: Journal    
DOI: 10.1007/s10854-011-0451-5     Document Type: Article
Times cited : (3)

References (14)
  • 3
    • 0006722701 scopus 로고    scopus 로고
    • The future of microelectronics
    • The future of microelectronics, Nature 406(6799) (2000)
    • (2000) Nature , vol.406 , Issue.6799
  • 5
    • 25644456000 scopus 로고    scopus 로고
    • Effects of ambient and dissolved oxygen concentration in ultrapure water on initial growth of native oxide on a silicon (100) surface
    • DOI 10.1149/1.1946487
    • F Li MK Balazs S Anderson 2005 Effects of ambient and dissolved oxygen concentration in ultrapure water on initial growth of native oxide on a silicon (100) surface J. Electrochem. Soc. 152 8 G669 G673 10.1149/1.1946487 1:CAS:528:DC%2BD2MXnvVSrt7c%3D (Pubitemid 41381159)
    • (2005) Journal of the Electrochemical Society , vol.152 , Issue.8
    • Li, F.1    Balazs, M.K.2    Anderson, S.3
  • 6
    • 79952326399 scopus 로고    scopus 로고
    • Using novel spectroscopy and spectrometry techniques for the quantitative analysis of photovoltaic thin films and materials
    • F Li S Anderson 2010 Using novel spectroscopy and spectrometry techniques for the quantitative analysis of photovoltaic thin films and materials Photovoltaics Int. 7 111 118
    • (2010) Photovoltaics Int. , vol.7 , pp. 111-118
    • Li, F.1    Anderson, S.2
  • 7
    • 0000291696 scopus 로고
    • Determination of trace elements in solid plastic materials by laser ablation-inductively coupled plasma mass spectrometry
    • 10.1039/ja9910600145 1:CAS:528:DyaK3MXhsVCmtbo%3D
    • J Marshall J Franks I Abell C Tye 1991 Determination of trace elements in solid plastic materials by laser ablation-inductively coupled plasma mass spectrometry J. Anal. At. Spectrom. 6 145 150 10.1039/ja9910600145 1:CAS:528:DyaK3MXhsVCmtbo%3D
    • (1991) J. Anal. At. Spectrom. , vol.6 , pp. 145-150
    • Marshall, J.1    Franks, J.2    Abell, I.3    Tye, C.4
  • 8
    • 80053349903 scopus 로고    scopus 로고
    • Variable-pressure soft-electron beam lithography (vp soft-ebl)
    • B Myers Z Pan S Donthu V Dravid 2007 Variable-pressure soft-electron beam lithography (vp soft-ebl) Microsc Microanal 13 Suppl 2 174 175
    • (2007) Microsc Microanal , vol.13 , Issue.SUPPL. 2 , pp. 174-175
    • Myers, B.1    Pan, Z.2    Donthu, S.3    Dravid, V.4
  • 9
    • 0037688998 scopus 로고    scopus 로고
    • The beam-gas and signal-gas interactions in the variable pressure scanning electron microscope
    • C Mathieu 1999 The beam-gas and signal-gas interactions in the variable pressure scanning electron microscope Scanning Microsc. 13 1 23 41
    • (1999) Scanning Microsc. , vol.13 , Issue.1 , pp. 23-41
    • Mathieu, C.1
  • 10
    • 0034406812 scopus 로고    scopus 로고
    • Accuracy, precision and detection limits of SEM-WDS, SEM-EDS and PIXE in the multi-elemental analysis of medieval glass
    • 10.1002/(SICI)1097-4539(200001/02)29:1<111::AID-XRS408>3.0.CO;2-W 1:CAS:528:DC%2BD3cXhtVSns7g%3D
    • P Kuisma-Kursula 2000 Accuracy, precision and detection limits of SEM-WDS, SEM-EDS and PIXE in the multi-elemental analysis of medieval glass X-ray Spectrom. 29 111 118 10.1002/(SICI)1097-4539(200001/02)29:1<111::AID- XRS408>3.0.CO;2-W 1:CAS:528:DC%2BD3cXhtVSns7g%3D
    • (2000) X-ray Spectrom. , vol.29 , pp. 111-118
    • Kuisma-Kursula, P.1
  • 13
    • 80053363942 scopus 로고
    • Calculations of activation energy of ionic conductivity in silica glass by classical methods
    • D.A. Stuart, Calculations of activation energy of ionic conductivity in silica glass by classical methods, J. Am. Ceram. Soc 573 (1954)
    • (1954) J. Am. Ceram. Soc , vol.573
    • Stuart, D.A.1
  • 14
    • 68349103266 scopus 로고    scopus 로고
    • Comparative study of deposits with laser ablation inductively coupled plasma mass spectrometry and scanning electron microscopy-energy-dispersive spectrometry
    • 10.1021/ef801039g 1:CAS:528:DC%2BD1MXotlOmur8%3D
    • MH Piispanen MS Tiainen RS Laitinen 2009 Comparative study of deposits with laser ablation inductively coupled plasma mass spectrometry and scanning electron microscopy-energy-dispersive spectrometry Energy Fuels 23 7 3446 3450 10.1021/ef801039g 1:CAS:528:DC%2BD1MXotlOmur8%3D
    • (2009) Energy Fuels , vol.23 , Issue.7 , pp. 3446-3450
    • Piispanen, M.H.1    Tiainen, M.S.2    Laitinen, R.S.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.