Integration of clamped-clamped suspended single-walled carbon nanotubes into SOI MEMS

NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems

Volumn , Issue , 2011, Pages 37-40

  Lee, Shih Wei ^a   Muoth, Matthias ^a   Durrer, Lukas ^a   Roman, Cosmin ^a   Hierold, Christofer ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

clamping; contacts; integration; MEMS; suspended; SWNTs; top metallization

Indexed keywords

BRIDGE STRUCTURES; CLAMPING; INTEGRATION PROCESS; PHYSICAL DAMAGES; SOI-MEMS; SUSPENDED; SWNT GROWTH; SWNTS; WET PROCESS;

INTEGRATION; MICROELECTROMECHANICAL DEVICES;

SINGLE-WALLED CARBON NANOTUBES (SWCN);

EID: 80053334657     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/NEMS.2011.6017289     Document Type: Conference Paper

References (10)

1. N. R. Franklin, Q. Wang, T. W. Tombler, A. Javey, M. Shim and H. J. Dai, "Integration of suspended carbon nanotube arrays into electronic devices and electromechanical systems," Applied Physics Letters, vol. 81, pp. 913-915, Jul 29 2002.
2. G. A. Karp, A. Ya'akobovitz, M. David-Pur, Z. Ioffe, O. Cheshnovsky, S. Krylov and Y. Hanein, "Integration of suspended carbon nanotubes into micro-fabricated devices," Journal of Micromechanics and Microengineering, vol. 19, pp. 085021-085026, Aug 2009.
3. M. Muoth, T. Helbling, L. Durrer, S. W. Lee, C. Roman and C. Hierold, "Hysteresis-free operation of suspended carbon nanotube transistors," Nature Nanotechnology, vol. 5, pp. 589-592, Aug 2010.
4. L. Durrer, T. Helbling, C. Zenger, A. Jungen, C. Stampfer and C. Hierold, "SWNT growth by CVD on Ferritin-based iron catalyst nanoparticles towards CNT sensors," Sensors and Actuators B-Chemical, vol. 132, pp. 485-490, Jun 16 2008.
5. S. W. Lee, M. Muoth, T. Helbling, M. Mattmann and C. Hierold, "ALD-assisted metal lift-off for contamination-free contact areas to carbon nanotubes," presented at the Micro and nano Engineering 2010, Genova, Italy, 2010.
6. T. Helbling, C. Hierold, C. Roman, L. Durrer, M. Mattmann and V. M. Bright, "Long term investigations of carbon nanotube transistors encapsulated by atomic-layer-deposited Al2O3 for sensor applications," Nanotechnology, vol. 20, Oct 28 2009.
7. M. Muoth, et al, "Encapsulation of electrical contacts for suspended single-walled carbon nanotubes by atomic layer deposition," Phys. Status Solidi B, accepted, available online http://dx.doi.org/10.1002/pssb.201000174, 2010.
8. A. Javey, et al., "Self-aligned ballistic molecular transistors and electrically parallel nanotube arrays," Nano Letters, vol. 4, pp. 1319-1322, Jul 2004. (Pubitemid 39099196)
9. J. W. Ward, B. Q. Wei and P. M. Ajayan, "Substrate effects on the growth of carbon nanotubes by thermal decomposition of methane," Chemical Physics Letters, vol. 376, pp. 717-725, Jul 31 2003.
10. A. Jungen, et al., "Synthesis of individual single-walled carbon nanotube bridges controlled by support micromachining," Journal of Micromechanics and Microengineering, vol. 17, pp. 603-608, Mar 2007. (Pubitemid 46778474)