Hexagonal boron nitride from a borazine precursor for coating of SiBNC fibers using a continuous atmospheric pressure CVD process

Chemical Vapor Deposition

Volumn 17, Issue 7-9, 2011, Pages 221-227

  Ye, Yaping ^a,c   Graupner, Uta ^a,d   Krüger, Reinhard ^a,b  

^a FRAUNHOFER INSTITUTE FOR SILICATE RESEARCH ISC   (Germany)

^b UNIVERSITY HOSPITAL WÜRZBURG   (Germany)

^c UNIVERSITY OF MUNICH   (Germany)

^d Police Hamburg LKA 33   (Germany)

Author keywords

APCVD; Borazine; Continuous fiber coating; H BN; SiBNC fiber

Indexed keywords

APCVD; ATMOSPHERIC PRESSURE CVD; BORAZINE; CERAMIC COMPOSITES; COATING DEPOSITION; COATING STRUCTURES; CONTINUOUS FIBER COATING; DEPOSITION PARAMETERS; FOURIER TRANSFORM INFRARED; GAS VELOCITY; H-BN; HEXAGONAL BORON NITRIDE; HEXAGONAL BORON NITRIDE (H-BN); HIGH CONCENTRATION; LOW OXYGEN; MULTIFILAMENTS; REACTANT CONCENTRATIONS; SI (100) SUBSTRATE; SI SUBSTRATES;

ATMOSPHERIC PRESSURE; BORON; BORON NITRIDE; DEPOSITION; DEPOSITION RATES; FIBERS; FOURIER TRANSFORMS; NITRIDES; SCANNING ELECTRON MICROSCOPY; X RAY DIFFRACTION;

COATINGS;

EID: 80053191778     PISSN: 09481907     EISSN: 15213862     Source Type: Journal    
DOI: 10.1002/cvde.201106911     Document Type: Article

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