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Japanese Journal of Applied Physics

Volumn 50, Issue 9 PART 3, 2011, Pages

Multilayer thin-film capacitor fabricated by radio-frequency magnetron sputtering

(4) Imamiya, Yuji a Kanno, Isaku a Yokokawa, Ryuji a Kotera, Hidetoshi a

a KYOTO UNIVERSITY (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC LAYER; INTERNAL ELECTRODES; MULTI-LAYERED; MULTILAYER CERAMIC CAPACITORS; PT ELECTRODE; RADIO-FREQUENCY-MAGNETRON SPUTTERING; RELATIVE DIELECTRIC CONSTANT; SHADOW MASK; SI SUBSTRATES; SPUTTERING DEPOSITION; THIN-FILM CAPACITORS;

BARIUM COMPOUNDS; CERAMIC CAPACITORS; DIELECTRIC LOSSES; ELECTRODES; FILM PREPARATION; MULTILAYERS; PLATINUM; SEMICONDUCTING SILICON COMPOUNDS; SUBSTRATES; THIN FILM CIRCUITS;

ELECTROLYTIC CAPACITORS;

EID: 80053068718 PISSN: 00214922 EISSN: 13474065 Source Type: Journal
DOI: 10.1143/JJAP.50.09NA01 Document Type: Article

Times cited : (8)

References (22)

1
- 0003455323
- (American Ceramic Society, Westerville, OH, Chap. 4
- R. E. Mistler and E. R. Twiname: Tape Casting: Theory and Practice (American Ceramic Society, Westerville, OH, 2000) Chap. 4, p. 83.
- (2000) Tape Casting: Theory and Practice , pp. 83
- Mistler, R.E.¹ Twiname, E.R.²

2
- 0040054447
- Y. Sakabe: Curr. Opin. Solid State Mater. 2 (1997) 584.
- (1997) Curr. Opin. Solid State Mater. , vol.2 , pp. 584
- Sakabe, Y.¹

3
- 0033996053
- A. I. Y. Tok, F. Y. C. Boey, and Y. C. Lam: Mater. Sci. Eng. A 280 (2000) 282.
- (2000) Mater. Sci. Eng. A , vol.280 , pp. 282
- Tok, A.I.Y.¹ Boey, F.Y.C.² Lam, Y.C.³

4
- 0024936194
- S. W. Freiman and R. C. Pohanka: J. Am. Ceram. Soc. 72 (1989) 2258.
- (1989) J. Am. Ceram. Soc. , vol.72 , pp. 2258
- Freiman, S.W.¹ Pohanka, R.C.²

5
- 0038343573
- K. Kishi, Y. Mizuno, and H. Chazono: Jpn. J. Appl. Phys. 42 (2003) 1.
- (2003) Jpn. J. Appl. Phys. , vol.42 , pp. 1
- Kishi, K.¹ Mizuno, Y.² Chazono, H.³

6
- 0035118990
- C. A. Randall: J. Ceram. Soc. Jpn. 109 (2001) S2.
- (2001) J. Ceram. Soc. Jpn. , vol.109
- Randall, C.A.¹

7
- 34548097741
- G. Arlt, D. Hennings, and G. de With: J. Appl. Phys. 58 (1985) 1619.
- (1985) J. Appl. Phys. , vol.58 , pp. 1619
- Arlt, G.¹ Hennings, D.² De With, G.³

8
- 0031276289
- X. Li and W. H. Shih: J. Am. Ceram. Soc. 80 (1997) 2844.
- (1997) J. Am. Ceram. Soc. , vol.80 , pp. 2844
- Li, X.¹ Shih, W.H.²

9
- 36048949039
- Z. Zhao, V. Buscaglia, M. Viviani, M. T. Buscaglia, L. Mitoseriu, A. Testino, M. Nygren, M. Johnsson, and P. Nanni: Phys. Rev. B 70 (2004) 024107.
- (2004) Phys. Rev. B , vol.70 , pp. 024107
- Zhao, Z.¹ Buscaglia, V.² Viviani, M.³ Buscaglia, M.T.⁴ Mitoseriu, L.⁵ Testino, A.⁶ Nygren, M.⁷ Johnsson, M.⁸ Nanni, P.⁹

10
- 29144456398
- M. Dawber, K. M. Rabe, and J. F. Scott: Rev. Mod. Phys. 77 (2005) 1083.
- (2005) Rev. Mod. Phys. , vol.77 , pp. 1083
- Dawber, M.¹ Rabe, K.M.² Scott, J.F.³

11
- 0031636466
- D. Dimos and C. H. Mueller: Annu. Rev. Mater. Sci. 28 (1998) 397.
- (1998) Annu. Rev. Mater. Sci. , vol.28 , pp. 397
- Dimos, D.¹ Mueller, C.H.²

12
- 84957229108
- G. H. Haertling: J. Vac. Sci. Technol. A 9 (1991) 414.
- (1991) J. Vac. Sci. Technol. A , vol.9 , pp. 414
- Haertling, G.H.¹

13
- 0029292162
- R. Moazzami: Semicond. Sci. Technol. 10 (1995) 375.
- (1995) Semicond. Sci. Technol. , vol.10 , pp. 375
- Moazzami, R.¹

14
- 0033682798
- P. Muralt: J. Micromech. Microeng. 10 (2000) 136.
- (2000) J. Micromech. Microeng. , vol.10 , pp. 136
- Muralt, P.¹

15
- 35348846979
- J. F. Scott and C. A. Paz de Araujo: Science 246 (1989) 1400.
- (1989) Science , vol.246 , pp. 1400
- Scott, J.F.¹ Paz De Araujo, C.A.²

16
- 33748892269
- N. Setter, D. Damjanovic, L. Eng, G. Fox, S. Gevorgian, S. Hong, A. Kingon, H. Kohlstedt, N. Y. Park, and G. B. Stephenson: J. Appl. Phys. 100 (2006) 051606.
- (2006) Stephenson J. Appl. Phys. , vol.100 , pp. 051606
- Setter, N.¹ Damjanovic, D.² Eng, L.³ Fox, G.⁴ Gevorgian, S.⁵ Hong, S.⁶ Kingon, A.⁷ Kohlstedt, H.⁸ Park, N.Y.⁹ B, G..¹⁰

17
- 0001754225
- H. M. Christen, E. D. Specht, D. P. Norton, M. F. Chisholm, and L. A. Boatner: Appl. Phys. Lett. 72 (1998) 2535.
- (1998) Appl. Phys. Lett. , vol.72 , pp. 2535
- Christen, H.M.¹ Specht, E.D.² Norton, D.P.³ Chisholm, M.F.⁴ Boatner, L.A.⁵

18
- 0003254474
- I. Kanno, S. Hayashi, R. Takayama, and T. Hirao: Appl. Phys. Lett. 68 (1996) 328.
- (1996) Appl. Phys. Lett. , vol.68 , pp. 328
- Kanno, I.¹ Hayashi, S.² Takayama, R.³ Hirao, T.⁴

19
- 13444282077
- H. N. Lee, H. M. Christen, M. F. Chisholm, C. M. Rouleau, and D. H. Lowndes: Nature 433 (2005) 395.
- (2005) Nature , vol.433 , pp. 395
- Lee, H.N.¹ Christen, H.M.² Chisholm, M.F.³ Rouleau, C.M.⁴ Lowndes, D.H.⁵

20
- 21544436965
- H. Tabata, H. Tanaka, and T. Kawai: Appl. Phys. Lett. 65 (1994) 1970.
- (1994) Appl. Phys. Lett. , vol.65 , pp. 1970
- Tabata, H.¹ Tanaka, H.² Kawai, T.³

21
- 0032675439
- Y. Sakabe, Y. Takeshima, and K. Tanaka: J. Electroceram. 3 (1999) 115.
- (1999) J. Electroceram. , vol.3 , pp. 115
- Sakabe, Y.¹ Takeshima, Y.² Tanaka, K.³

22
- 0032682985
- M. Grossmann, R. Slowak, S. Hoffmann, H. John, and R. Waser: J. Eur. Ceram. Soc. 19 (1999) 1413.
- (1999) J. Eur. Ceram. Soc. , vol.19 , pp. 1413
- Grossmann, M.¹ Slowak, R.² Hoffmann, S.³ John, H.⁴ Waser, R.⁵

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