High frequency ultrasound, a tool for elastic properties measurement of thin films fabricated on silicon

Advanced Materials Research

Volumn 324, Issue , 2011, Pages 277-281

  Campistron, P ^a   Carlier, J ^a   Saad, N ^a,b   Gao, J ^c   Toubal, M ^a   Dupont, L ^a   Nassar, G ^a   Nongaillard, B ^a  

^a UNIVERSITÉ DE VALENCIENNES   (France)

^b LEBANESE UNIVERSITY   (Lebanon)

^c INSTITUT D ELECTRONIQUE   (France)

Author keywords

High frequency transducers; Ultrasonic characterization; Ultrasound

Indexed keywords

DIELECTRIC PERMITTIVITIES; ELASTIC PROPERTIES; EMBEDDED PARTICLES; FREQUENCY RANGES; HIGH FREQUENCY; HIGH FREQUENCY ACOUSTICS; HIGH FREQUENCY MEASUREMENTS; HIGH FREQUENCY TRANSDUCERS; HIGH FREQUENCY ULTRASOUNDS; INVERSION METHODS; LONGITUDINAL WAVES; MECHANICAL IMPEDANCES; METALLIC LAYERS; PARAMETER MEASUREMENT; SILICON SUBSTRATES; SPUTTERING TECHNOLOGY; THIN FILM MATERIAL; THIN LAYERS; ULTRASONIC CHARACTERIZATION; ZNO TRANSDUCERS;

ACOUSTIC IMPEDANCE; CHARACTERIZATION; CHEMICALS REMOVAL (WATER TREATMENT); ELASTICITY; MEASUREMENTS; NANOCOMPOSITE FILMS; PERMITTIVITY; SEMICONDUCTING SILICON COMPOUNDS; SHEAR FLOW; SHEAR WAVES; SILICON WAFERS; SINGLE CRYSTALS; TRANSDUCERS; ULTRASONIC TRANSDUCERS; ULTRASONICS; ZINC OXIDE;

THIN FILMS;

EID: 80053000094     PISSN: 10226680     EISSN: None     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/AMR.324.277     Document Type: Conference Paper

References (4)

1. Lemons, R. A., and Quate, C. F., "Acoustic microscope-scanning version, " Appl. Phys. Lett., vol. 24, pp. 163-165, 1974
2. E. Bridoux, B. Nongaillard, J.M. Rouvaen, C. Bruneel, G. Thomin, and R. Torguet, "Optimization of a transmission acoustic microscope, " J. Appl. Phys., vol.49, no. 2, pp 574-579, 1978
3. Y. Deblock, P. Campistron, M. Lippert, and C. Bruneel, Electrical characterization of plate piezoelectric transducers bonded to a finite substrate, J. Acoust. Soc. Am. 111 (6), 2681-2685, 2002 (Pubitemid 34760254)
4. S.Wang, P.Campistron, J.Carlier, D.Callens-Debavelaere, B.Nongaillard, A.NDieguene, G.Nassar, C.Soyer, X.Zhao, "SU8 based nanocomposites for acoustical matching layer", IEEE Transactions on Ultrasonics, Ferroelectrics and frequency control, Vol 56, no.7, (2009)