Determination of refractive index contrast and surface contraction in waveguide channels using multiobjective genetic algorithm applied to spectroscopic ellipsometry

Journal of Lightwave Technology

Volumn 29, Issue 19, 2011, Pages 2971-2978

  Fernandes, Vasco R ^a   Vicente, Carlos Miguel Santos ^a   Pecoraro, Edison ^a   Karpinsky, Dmitry ^b   Kholkin, Andrei L ^b   Wada, Naoya ^c   Andre, Paulo S ^a   Ferreira, Rute A S ^a  

^a UNIVERSITY OF AVEIRO   (Portugal)

^b UNIVERSITY OF AVEIRO   (Portugal)

^c NATIONAL INSTITUTE OF INFORMATION AND COMMUNICATIONS TECHNOLOGY   (Japan)

Author keywords

Ellipsometry; genetic algorithms (GAs); optical waveguides; organic inorganic hybrid materials; refractive index

Indexed keywords

CHANNEL WAVEGUIDE; DI-UREASILS; DIRECT WRITING; MULTI-OBJECTIVE GENETIC ALGORITHM; NEAR-FIELD INTENSITY; OPTICAL SIGNALS; ORGANIC-INORGANIC; ORGANIC-INORGANIC HYBRID MATERIALS; REFRACTIVE INDEX PROFILES; SILICA ON SILICON; SURFACE ABLATION; SURFACE CONTRACTION; SURFACE DEFORMATION; UV LASER RADIATION; WAVEGUIDE CHANNELS;

ABLATION; ATOMIC FORCE MICROSCOPY; ELLIPSOMETRY; GENETIC ALGORITHMS; HYBRID MATERIALS; OPTICAL WAVEGUIDES; PLASMA FILLED WAVEGUIDES; SILICA; SPECTROSCOPIC ELLIPSOMETRY; SURFACES; WAVEGUIDES; ZIRCONIUM;

REFRACTIVE INDEX;

EID: 80052909667     PISSN: 07338724     EISSN: None     Source Type: Journal    
DOI: 10.1109/JLT.2011.2163924     Document Type: Article

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