Evaluation of ellipsometric measurements using complex strategies

Thin Solid Films

Volumn 455-456, Issue , 2004, Pages 95-100

  Polgar O ^a   Fried, M ^a   Lohner, T ^a   Barsony I ^a  

^a RESEARCH INSTITUTE FOR TECHNICAL PHYSICS AND MATERIALS SCIENCE   (Hungary)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; ANISOTROPY; BOUNDARY LAYERS; COMPUTATIONAL COMPLEXITY; COMPUTER SOFTWARE; INVERSE PROBLEMS; ITERATIVE METHODS; MATHEMATICAL MODELS; THIN FILMS;

GRADIENT SEARCH; MULTI-LAYER STRUCTURES; OPTICAL MODELS;

ELLIPSOMETRY;

EID: 17144461544     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2003.12.051     Document Type: Conference Paper

References (12)

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2. Azzam R.M.A., Bashara N.M. Ellipsometry and Polarized Light. 1977;North-Holland, Amsterdam.
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