Critical discussion on (100) and (110) orientation dependent transport: nMOS planar and FinFET

Digest of Technical Papers - Symposium on VLSI Technology

Volumn , Issue , 2011, Pages 18-19

  Young, C D ^a   Baykan, M O ^a,b   Agrawal, A ^c   Madan, H ^a,c   Akarvardar, K ^a,d   Hobbs, C ^a   Ok, I ^a   Taylor, W ^a   Smith, C E ^a   Hussain, M M ^a   Nishida, T ^b   Thompson, S ^b   Majhi, P ^a   Kirsch, P ^a   Datta, S ^c   Jammy, R ^a  

^a SEMATECH   (United States)

^b UNIVERSITY OF FLORIDA   (United States)

^c PENNSYLVANIA STATE UNIVERSITY   (United States)

^d IBM MICROELECTRONICS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EMPIRICAL APPROACH; EXPERIMENTAL DATA; FINFETS; FIRST-PRINCIPLES; MOSFETS; ORIENTATION DEPENDENT; SOI FINFETS;

ELECTRON MOBILITY;

INTEGRATED CIRCUITS;

EID: 80052679969     PISSN: 07431562     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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