Conditioning circuit for precise SiC capacitive pressure sensors

Proceedings of the 2011 6th IEEE Conference on Industrial Electronics and Applications, ICIEA 2011

Volumn , Issue , 2011, Pages 559-563

  Zhang, Lian ^a   Yu, Jinsong ^a   Liu, Hao ^a  

^a BEIHANG UNIVERSITY   (China)

Author keywords

capacitive sensors; circuits noise; conditioning circuits; SiC MEMS

Indexed keywords

CAPACITIVE PRESSURE SENSORS; CAPACITIVE SENSOR; COMMERCIAL EXPLOITATION; CONDITIONING CIRCUIT; CONDITIONING CIRCUITS; HIGH-SENSITIVITY; INDUSTRIAL ENVIRONMENTS; LOW TEMPERATURES; LOW-POWER CONSUMPTION; MECHANICAL CHARACTERS; PARASITIC CAPACITANCE; SIC MEMS; SMALL SIZE;

CAPACITANCE; CHEMICAL STABILITY; INDUSTRIAL ELECTRONICS; INDUSTRY; PARTIAL PRESSURE SENSORS; PRESSURE SENSORS; SILICON CARBIDE;

LOW POWER ELECTRONICS;

EID: 80052235207     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICIEA.2011.5975648     Document Type: Conference Paper

References (15)

1. Wei Tang, Zhe Chen, Dayu Tian, Haixia Zhang, FABRICATION OF SIC MEMS PRESSURE SENSOR BY ANODIC BONDING, June 3-5, 2008, Clear Water Bay, Kowloon, Hong Kong
2. http://en.wikipedia.org/wiki/Parasitic-capacitance
3. Yongyue Qi, Haitao Wang, Yuchi Lin Meirong Zhao, Measuring system for Micor Force Based on Electrostatic Theory, ICEME 2009 pp. 524-527
4. Zhe Chen, Dayu Tian, Guobing Zhang, Haixia Zhang. "Investigation of PECVD SiC nano film" 2007 7th IEEEInternational Conference on Nanotechnology, Hong Kong, Sep, 2007
5. Ji Ming, Chen Zhe, Tian Da-yu, Wang Wei, Zhang Haixia, Stress and Stress Gradient Control Technology of Multi-Layer Metal-SiC Thin Film, NANOTECHNOLOGY AND PRECISION ENGINEERING, 2008, 6(1)
6. Zou Li-ming, Guo Hang, capacitive pressure sensor with circular island structure. OPTICS AND PRECISION ENGINEERING. 2009
7. Y. Cao and G. C. Temes, "High-accuracy circuit for on-chip capacitance ratio testing or sensor readout," IEEE Trans. Circuits Syst., vol. 41, pp. 637-639, Sept. 1994.
8. X. Li, G. C. M. Meijer, and G. W. de Jong, "An accurate smart capacitive angular-position sensor with a full circle range," in Instrum. Meas. Tech. Conf. Proc., 1995, pp. 80-83
9. XX. Huang, Touch mode capacitive pressure sensor modeling, Master thesis, EEAP, Case Western Reserve University, Cleveland, OH, USA, May 1994.
10. Wei Tang, Zhe Chen, Dayu Tian, Haixia Zhang, fabrication of SiC MEMS pressure sensor by and odic bonding, June 3-5, 2008, Clear Water Bay, Kowloon, Hong Kong S. Timoschenko, Theory of Plates and Shells, McGraw-Hill, NewYork, 1940.
11. Sergey Y. Yurish, Universal Capacitive Sensors and Transducers Interface, Proceedings of the Eurosensors XXIII conference, September 2009, Pages 441-444.
12. K. Mochizuki, T. Masuda and K. Watanabe, An interface circuit for high-accuracy signal processing of differential-capacitance transducers, IEEE Trans. Instrum. Meas. 47 (1998), pp. 823-827. Full Text via CrossRef | View Record in Scopus | Cited By in Scopus (20)
13. AD7747 24-bit capacitance-to-digital converter with temperature sensor, Analog Devices. USA, 2007
14. Fang Hui-min, Zhu Bo-shen, Li Dong-guang, A Capacitance Measurement Circuit Based on the Switched-capacitor Technique, ELECTRICAL MEASUREMENT & INSTRUMENTATION, 2005, 42(2)
15. N. Yazdi, H. Külah and K. Najafi, "Precision Readout Circuits for Capacitive Microaccelerometers," IEEE Sensors 2004, pp. 28-31, October 2004.