Planarization of patterned magnetic recording media to enable head flyability

Microsystem Technologies

Volumn 17, Issue 3, 2011, Pages 395-402

  Choi, Chulmin ^a   Yoon, Yeoungchin ^a   Hong, Daehoon ^a   Oh, Young ^a   Talke, Frank E ^a   Jin, Sungho ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BIT PATTERNS; E-BEAM LITHOGRAPHY; FLYABILITY; FLYABILITY TESTING; FLYING HEIGHTS; FLYING STABILITY; GLASS DISKS; HYDROGEN SILSESQUIOXANE; MAGNETIC RECORDING MEDIA; MAGNETIC RECORDING SLIDERS; NANO-SIZED; PATTERNED MEDIAS; PLANARIZATION; PLANARIZATION PROCESS; SMOOTH SURFACE; STANDARD DEVIATION;

ELECTRON BEAM LITHOGRAPHY; GLASS; HYDROGEN; MAGNETIC DISK STORAGE; MAGNETIC RECORDING; NANOIMPRINT LITHOGRAPHY;

REACTIVE ION ETCHING;

EID: 80052137364     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-011-1222-1     Document Type: Article

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